Piezoelectric Elliptical Plate Micromechanical Resonator with Low Motional Resistance for Resonant Sensing in Liquid

Begum, H; Qian, J; Lee, JEY

Piezoelectric Elliptical Plate Micromechanical Resonator with Low Motional Resistance for Resonant Sensing in Liquid

Begum, H Qian, J Lee, JEY

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Publisher:: IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Publication Type:: Journal Article
Citation:: IEEE Sensors Journal, 2021, 21, (6), pp. 7339-7347
Issue Date:: 2021-03-15

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Field	Value	Language
dc.contributor.author	Begum, H
dc.contributor.author	Qian, J
dc.contributor.author	Lee, JEY
dc.date.accessioned	2024-08-28T01:28:48Z
dc.date.available	2024-08-28T01:28:48Z
dc.date.issued	2021-03-15
dc.identifier.citation	IEEE Sensors Journal, 2021, 21, (6), pp. 7339-7347
dc.identifier.issn	1530-437X
dc.identifier.issn	1558-1748
dc.identifier.uri	http://hdl.handle.net/10453/180569
dc.description.abstract	Key to realizing practical resonators for liquid-phase sensing applications is efficient electromechanical transduction and reasonable Q in liquid, which determine the motional resistance (Rm). Both lower Rm and high liquid phase Q are important for realizing a more stable close-loop oscillator to allow a lower detection limit. But Rm usually increases when scaling down resonator size, leading to weak output signals in liquid. This article describes a piezoelectrically transduced micromechanical elliptical plate resonator (EPR) targeting liquid-phase sensing applications. The proposed EPR delivers lower R m relative to other disk-based modes and has a reasonable Q in water. These two features are critical for eventually realizing a closed-loop system to enable real-time frequency tracking for sensing applications. The low Rm arises from enhanced transduction efficiency associated with the modal lateral strain profile. The EPR's moderate liquid phase Q stems from transducing a stiff lateral bulk mode that increases energy storage. The proposed EPR can be scaled down more efficiently compared to other disk-based modes in the limit of mode shape distortion by anchors when scaling down the resonator below a threshold. Experimental results in water are demonstrated for a 500μ m by 400μ m EPR, which delivers an Rm of only 2.68 kΩ in water without feedthrough cancellation. Scaling down the device to 300μ m by 200μ m, we demonstrate an Rm of just 5.5 kΩ and Q of 245 in water. The proposed EPR topology boasts the lowest Rm among resonators immersed in liquid after normalizing over the device area.
dc.language	English
dc.publisher	IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
dc.relation.ispartof	IEEE Sensors Journal
dc.relation.isbasedon	10.1109/JSEN.2020.3047535
dc.rights	info:eu-repo/semantics/openAccess
dc.subject	0205 Optical Physics, 0906 Electrical and Electronic Engineering, 0913 Mechanical Engineering
dc.subject.classification	Analytical Chemistry
dc.subject.classification	40 Engineering
dc.title	Piezoelectric Elliptical Plate Micromechanical Resonator with Low Motional Resistance for Resonant Sensing in Liquid
dc.type	Journal Article
utslib.citation.volume	21
utslib.for	0205 Optical Physics
utslib.for	0906 Electrical and Electronic Engineering
utslib.for	0913 Mechanical Engineering
pubs.organisational-group	University of Technology Sydney
pubs.organisational-group	University of Technology Sydney/Faculty of Engineering and Information Technology
pubs.organisational-group	University of Technology Sydney/Faculty of Engineering and Information Technology/School of Electrical and Data Engineering
pubs.organisational-group	University of Technology Sydney/All Manual Groups
pubs.organisational-group	University of Technology Sydney/All Manual Groups/Centre for Audio, Acoustics and Vibration (CAAV)
utslib.copyright.status	open_access	*
dc.date.updated	2024-08-28T01:28:46Z
pubs.issue	6
pubs.publication-status	Published
pubs.volume	21
utslib.citation.issue	6

Abstract:

Key to realizing practical resonators for liquid-phase sensing applications is efficient electromechanical transduction and reasonable Q in liquid, which determine the motional resistance (Rm). Both lower Rm and high liquid phase Q are important for realizing a more stable close-loop oscillator to allow a lower detection limit. But Rm usually increases when scaling down resonator size, leading to weak output signals in liquid. This article describes a piezoelectrically transduced micromechanical elliptical plate resonator (EPR) targeting liquid-phase sensing applications. The proposed EPR delivers lower R m relative to other disk-based modes and has a reasonable Q in water. These two features are critical for eventually realizing a closed-loop system to enable real-time frequency tracking for sensing applications. The low Rm arises from enhanced transduction efficiency associated with the modal lateral strain profile. The EPR's moderate liquid phase Q stems from transducing a stiff lateral bulk mode that increases energy storage. The proposed EPR can be scaled down more efficiently compared to other disk-based modes in the limit of mode shape distortion by anchors when scaling down the resonator below a threshold. Experimental results in water are demonstrated for a 500μ m by 400μ m EPR, which delivers an Rm of only 2.68 kΩ in water without feedthrough cancellation. Scaling down the device to 300μ m by 200μ m, we demonstrate an Rm of just 5.5 kΩ and Q of 245 in water. The proposed EPR topology boasts the lowest Rm among resonators immersed in liquid after normalizing over the device area.

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http://hdl.handle.net/10453/180569