Fabrication of free-standing lithium niobate nanowaveguides down to 50 nm in width

Geiss, R; Sergeyev, A; Hartung, H; Solntsev, AS; Sukhorukov, AA; Grange, R; Schrempel, F; Kley, EB; Tü Nnermann, A; Pertsch, T

Fabrication of free-standing lithium niobate nanowaveguides down to 50 nm in width

Geiss, R Sergeyev, A Hartung, H Solntsev, AS

Sukhorukov, AA Grange, R Schrempel, F Kley, EB Tü Nnermann, A Pertsch, T

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Publication Type:: Journal Article
Citation:: Nanotechnology, 2016, 27 (6)
Issue Date:: 2016-01-18

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Field	Value	Language
dc.contributor.author	Geiss, R	en_US
dc.contributor.author	Sergeyev, A	en_US
dc.contributor.author	Hartung, H	en_US
dc.contributor.author	Solntsev, AS https://orcid.org/0000-0003-4981-9730	en_US
dc.contributor.author	Sukhorukov, AA	en_US
dc.contributor.author	Grange, R	en_US
dc.contributor.author	Schrempel, F	en_US
dc.contributor.author	Kley, EB	en_US
dc.contributor.author	Tü Nnermann, A	en_US
dc.contributor.author	Pertsch, T	en_US
dc.date.issued	2016-01-18	en_US
dc.identifier.citation	Nanotechnology, 2016, 27 (6)	en_US
dc.identifier.issn	0957-4484	en_US
dc.identifier.uri	http://hdl.handle.net/10453/111880
dc.description.abstract	© 2016 IOP Publishing Ltd. Nonlinear optical nanoscale waveguides are a compact and powerful platform for efficient wavelength conversion. The free-standing waveguide geometry opens a range of applications in microscopy for local delivery of light, where in situ wavelength conversion helps to overcome various wavelength-dependent issues, such as biological tissue damage. In this paper, we present an original patterning method for high-precision fabrication of free-standing nanoscale waveguides based on lithium niobate, a material with a strong second-order nonlinearity and a broad transparency window covering the visible and mid-infrared wavelength ranges. The fabrication process combines electron-beam lithography with ion-beam enhanced etching and produces nanowaveguides with lengths from 5 to 50 μm, widths from 50 to 1000 nm and heights from 50 to 500 nm, each with a precision of few nanometers. The fabricated nanowaveguides are tested in an optical characterization experiment showing efficient second-harmonic generation.	en_US
dc.relation.ispartof	Nanotechnology	en_US
dc.relation.isbasedon	10.1088/0957-4484/27/6/065301	en_US
dc.subject.classification	Nanoscience & Nanotechnology	en_US
dc.title	Fabrication of free-standing lithium niobate nanowaveguides down to 50 nm in width	en_US
dc.type	Journal Article
utslib.citation.volume	6	en_US
utslib.citation.volume	27	en_US
pubs.embargo.period	Not known	en_US
pubs.organisational-group	/University of Technology Sydney
pubs.organisational-group	/University of Technology Sydney/Faculty of Science
pubs.organisational-group	/University of Technology Sydney/Faculty of Science/School of Mathematical and Physical Sciences
utslib.copyright.status	open_access
pubs.issue	6	en_US
pubs.publication-status	Published	en_US
pubs.volume	27	en_US

Abstract:

© 2016 IOP Publishing Ltd. Nonlinear optical nanoscale waveguides are a compact and powerful platform for efficient wavelength conversion. The free-standing waveguide geometry opens a range of applications in microscopy for local delivery of light, where in situ wavelength conversion helps to overcome various wavelength-dependent issues, such as biological tissue damage. In this paper, we present an original patterning method for high-precision fabrication of free-standing nanoscale waveguides based on lithium niobate, a material with a strong second-order nonlinearity and a broad transparency window covering the visible and mid-infrared wavelength ranges. The fabrication process combines electron-beam lithography with ion-beam enhanced etching and produces nanowaveguides with lengths from 5 to 50 μm, widths from 50 to 1000 nm and heights from 50 to 500 nm, each with a precision of few nanometers. The fabricated nanowaveguides are tested in an optical characterization experiment showing efficient second-harmonic generation.

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http://hdl.handle.net/10453/111880