Dense plasmas in magnetic traps: Generation of focused ion beams with controlled ion-to-neutral flux ratios

Baranov, O; Zhong, X; Fang, J; Kumar, S; Xu, S; Cvelbar, U; Mariotti, D; Ostrikov, K

Dense plasmas in magnetic traps: Generation of focused ion beams with controlled ion-to-neutral flux ratios

Baranov, O Zhong, X Fang, J

Kumar, S Xu, S Cvelbar, U Mariotti, D Ostrikov, K

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Publication Type:: Journal Article
Citation:: IEEE Transactions on Plasma Science, 2014, 42 (10), pp. 2518 - 2519
Issue Date:: 2014-10-01

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Field	Value	Language
dc.contributor.author	Baranov, O	en_US
dc.contributor.author	Zhong, X	en_US
dc.contributor.author	Fang, J https://orcid.org/0000-0002-2214-2902	en_US
dc.contributor.author	Kumar, S	en_US
dc.contributor.author	Xu, S	en_US
dc.contributor.author	Cvelbar, U	en_US
dc.contributor.author	Mariotti, D	en_US
dc.contributor.author	Ostrikov, K	en_US
dc.date.issued	2014-10-01	en_US
dc.identifier.citation	IEEE Transactions on Plasma Science, 2014, 42 (10), pp. 2518 - 2519	en_US
dc.identifier.issn	0093-3813	en_US
dc.identifier.uri	http://hdl.handle.net/10453/116098
dc.description.abstract	© 2014 IEEE. Customized magnetic traps were developed to produce a domain of dense plasmas with a narrow ion beam directed to a particular area of the processed substrate. A planar magnetron coupled with an arc discharge source created the magnetic traps to confine the plasma electrons and generate the ion beam with the controlled ratio of ion-to-neutral fluxes. Images of the plasma jet patterns and numerical vizualizations help explaining the observed phenomena.	en_US
dc.relation.ispartof	IEEE Transactions on Plasma Science	en_US
dc.relation.isbasedon	10.1109/TPS.2013.2295626	en_US
dc.subject.classification	Fluids & Plasmas	en_US
dc.title	Dense plasmas in magnetic traps: Generation of focused ion beams with controlled ion-to-neutral flux ratios	en_US
dc.type	Journal Article
utslib.citation.volume	10	en_US
utslib.citation.volume	42	en_US
utslib.for	0202 Atomic, Molecular, Nuclear, Particle and Plasma Physics	en_US
utslib.for	0906 Electrical and Electronic Engineering	en_US
pubs.embargo.period	Not known	en_US
pubs.organisational-group	/University of Technology Sydney
pubs.organisational-group	/University of Technology Sydney/Faculty of Science
pubs.organisational-group	/University of Technology Sydney/Faculty of Science/School of Mathematical and Physical Sciences
utslib.copyright.status	closed_access
pubs.issue	10	en_US
pubs.publication-status	Published	en_US
pubs.volume	42	en_US

Abstract:

© 2014 IEEE. Customized magnetic traps were developed to produce a domain of dense plasmas with a narrow ion beam directed to a particular area of the processed substrate. A planar magnetron coupled with an arc discharge source created the magnetic traps to confine the plasma electrons and generate the ion beam with the controlled ratio of ion-to-neutral fluxes. Images of the plasma jet patterns and numerical vizualizations help explaining the observed phenomena.

Please use this identifier to cite or link to this item:

http://hdl.handle.net/10453/116098