Dense plasmas in magnetic traps: Generation of focused ion beams with controlled ion-to-neutral flux ratios

Publisher:
Institute of Electrical and Electronics Engineers
Publication Type:
Journal Article
Citation:
IEEE Transactions on Plasma Science, 2014, 42 (10), pp. 2518 - 2519
Issue Date:
2014-10-01
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© 2014 IEEE. Customized magnetic traps were developed to produce a domain of dense plasmas with a narrow ion beam directed to a particular area of the processed substrate. A planar magnetron coupled with an arc discharge source created the magnetic traps to confine the plasma electrons and generate the ion beam with the controlled ratio of ion-to-neutral fluxes. Images of the plasma jet patterns and numerical vizualizations help explaining the observed phenomena.
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