Fabrication of thin, luminescent, single-crystal diamond membranes

Magyar, AP; Lee, JC; Limarga, AM; Aharonovich, I; Rol, F; Clarke, DR; Huang, M; Hu, EL

Fabrication of thin, luminescent, single-crystal diamond membranes

Magyar, AP Lee, JC Limarga, AM Aharonovich, I

Rol, F Clarke, DR Huang, M Hu, EL

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Publication Type:: Journal Article
Citation:: Applied Physics Letters, 2011, 99 (8)
Issue Date:: 2011-08-22

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Field	Value	Language
dc.contributor.author	Magyar, AP	en_US
dc.contributor.author	Lee, JC	en_US
dc.contributor.author	Limarga, AM	en_US
dc.contributor.author	Aharonovich, I https://orcid.org/0000-0003-4304-3935	en_US
dc.contributor.author	Rol, F	en_US
dc.contributor.author	Clarke, DR	en_US
dc.contributor.author	Huang, M	en_US
dc.contributor.author	Hu, EL	en_US
dc.date.issued	2011-08-22	en_US
dc.identifier.citation	Applied Physics Letters, 2011, 99 (8)	en_US
dc.identifier.issn	0003-6951	en_US
dc.identifier.uri	http://hdl.handle.net/10453/122499
dc.description.abstract	The formation of single-crystal diamond membranes is an important prerequisite for the fabrication of high-quality optical cavities in this material. Diamond membranes fabricated using lift-off processes involving the creation of a damaged layer through ion implantation often suffer from residual ion damage, which severely limits their usefulness for photonic structures. The current work demonstrates that strategic etch removal of the most highly defective material yields thin, single-crystal diamond membranes with strong photoluminescence and a Raman signature approaching that of single-crystal bulk diamond. These optically active membranes can form the starting point for fabrication of high-quality optical resonators. © 2011 American Institute of Physics.	en_US
dc.relation.ispartof	Applied Physics Letters	en_US
dc.relation.isbasedon	10.1063/1.3628463	en_US
dc.subject.classification	Applied Physics	en_US
dc.title	Fabrication of thin, luminescent, single-crystal diamond membranes	en_US
dc.type	Journal Article
utslib.citation.volume	8	en_US
utslib.citation.volume	99	en_US
utslib.for	0204 Condensed Matter Physics	en_US
utslib.for	02 Physical Sciences	en_US
utslib.for	09 Engineering	en_US
utslib.for	10 Technology	en_US
pubs.embargo.period	Not known	en_US
pubs.organisational-group	/University of Technology Sydney
pubs.organisational-group	/University of Technology Sydney/Faculty of Science
pubs.organisational-group	/University of Technology Sydney/Faculty of Science/School of Mathematical and Physical Sciences
pubs.organisational-group	/University of Technology Sydney/Strength - IBMD - Initiative for Biomedical Devices
utslib.copyright.status	open_access
pubs.issue	8	en_US
pubs.publication-status	Published	en_US
pubs.volume	99	en_US

Abstract:

The formation of single-crystal diamond membranes is an important prerequisite for the fabrication of high-quality optical cavities in this material. Diamond membranes fabricated using lift-off processes involving the creation of a damaged layer through ion implantation often suffer from residual ion damage, which severely limits their usefulness for photonic structures. The current work demonstrates that strategic etch removal of the most highly defective material yields thin, single-crystal diamond membranes with strong photoluminescence and a Raman signature approaching that of single-crystal bulk diamond. These optically active membranes can form the starting point for fabrication of high-quality optical resonators. © 2011 American Institute of Physics.

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http://hdl.handle.net/10453/122499