Optical anisotropy due to perpendicular azimuth serial bideposition

Tai, MC; Gentle, AR; Arnold, MD; Smith, GB

Optical anisotropy due to perpendicular azimuth serial bideposition

Tai, MC

Gentle, AR

Arnold, MD

Smith, GB

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Publication Type:: Conference Proceeding
Citation:: Proceedings of SPIE - The International Society for Optical Engineering, 2017, 10356
Issue Date:: 2017-01-01

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Field	Value	Language
dc.contributor.author	Tai, MC https://orcid.org/0000-0002-3885-0743	en_US
dc.contributor.author	Gentle, AR https://orcid.org/0000-0001-8964-0722	en_US
dc.contributor.author	Arnold, MD https://orcid.org/0000-0003-4164-0242	en_US
dc.contributor.author	Smith, GB https://orcid.org/0000-0002-6985-2880	en_US
dc.date.issued	2017-01-01	en_US
dc.identifier.citation	Proceedings of SPIE - The International Society for Optical Engineering, 2017, 10356	en_US
dc.identifier.isbn	9781510611696	en_US
dc.identifier.issn	0277-786X	en_US
dc.identifier.uri	http://hdl.handle.net/10453/127570
dc.description.abstract	© 2017 SPIE. Angled columnar structures produced by oblique angle deposition possess useful optical polarization effects. It is well known that this is due to structural anisotropy but the relative contributions of factors affecting this anisotropy are not fully understood in all cases. Serial bideposited films where the azimuth is changed during deposition can have greater birefringence if the azimuths are directly opposed. In contrast, in this article the properties of perpendicular azimuth films are studied: silicon films at tilt angles 50-80° were deposited and analyzed. Electron microscopy confirmed that the silicon nanostructures were formed off-axis, meaning they did not develop along the deposition axes but followed the averaged azimuth. Optical measurements confirm that the maximum birefringence occurs closer to glancing angles, and optical modelling demonstrates that in contrast to fixed azimuth films the birefringence in these perpendicular azimuth films is primarily modulated by depolarization factors.	en_US
dc.relation.ispartof	Proceedings of SPIE - The International Society for Optical Engineering	en_US
dc.relation.isbasedon	10.1117/12.2273528	en_US
dc.title	Optical anisotropy due to perpendicular azimuth serial bideposition	en_US
dc.type	Conference Proceeding
utslib.citation.volume	10356	en_US
utslib.for	0999 Other Engineering	en_US
pubs.embargo.period	Not known	en_US
pubs.organisational-group	/University of Technology Sydney
pubs.organisational-group	/University of Technology Sydney/Faculty of Science
pubs.organisational-group	/University of Technology Sydney/Faculty of Science/School of Mathematical and Physical Sciences
utslib.copyright.status	open_access
pubs.publication-status	Published	en_US
pubs.volume	10356	en_US

Abstract:

© 2017 SPIE. Angled columnar structures produced by oblique angle deposition possess useful optical polarization effects. It is well known that this is due to structural anisotropy but the relative contributions of factors affecting this anisotropy are not fully understood in all cases. Serial bideposited films where the azimuth is changed during deposition can have greater birefringence if the azimuths are directly opposed. In contrast, in this article the properties of perpendicular azimuth films are studied: silicon films at tilt angles 50-80° were deposited and analyzed. Electron microscopy confirmed that the silicon nanostructures were formed off-axis, meaning they did not develop along the deposition axes but followed the averaged azimuth. Optical measurements confirm that the maximum birefringence occurs closer to glancing angles, and optical modelling demonstrates that in contrast to fixed azimuth films the birefringence in these perpendicular azimuth films is primarily modulated by depolarization factors.

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http://hdl.handle.net/10453/127570