MEMS piezoresistive flow sensors for sleep apnea therapy

Abbasnejad, B; Thorby, W; Razmjou, A; Jin, D; Asadnia, M; Ebrahimi Warkiani, M

MEMS piezoresistive flow sensors for sleep apnea therapy

Abbasnejad, B Thorby, W Razmjou, A Jin, D

Asadnia, M Ebrahimi Warkiani, M

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Publication Type:: Journal Article
Citation:: Sensors and Actuators, A: Physical, 2018, 279 pp. 577 - 585
Issue Date:: 2018-08-15

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Field	Value	Language
dc.contributor.author	Abbasnejad, B	en_US
dc.contributor.author	Thorby, W	en_US
dc.contributor.author	Razmjou, A	en_US
dc.contributor.author	Jin, D https://orcid.org/0000-0003-1046-2666	en_US
dc.contributor.author	Asadnia, M	en_US
dc.contributor.author	Ebrahimi Warkiani, M https://orcid.org/0000-0002-4184-1944	en_US
dc.date.issued	2018-08-15	en_US
dc.identifier.citation	Sensors and Actuators, A: Physical, 2018, 279 pp. 577 - 585	en_US
dc.identifier.issn	0924-4247	en_US
dc.identifier.uri	http://hdl.handle.net/10453/130617
dc.description.abstract	© 2018 Elsevier B.V. A MEMS liquid crystal polymer (LCP), used in the membrane-based pressure sensor, has been found highly useful as a flow sensor. Here we conducted a set of elaborate experiments using an air flow generator to investigate the potential of our LCP flow sensor for sleep apnea therapy. Critical properties of the LCP flow sensor, including flow range, resolution (sensitivity), accuracy, and response time, have been systematically characterized. As a result, LCP flow sensor achieves a limit of detection of 8 LPM to measure flow rate, better than the commercial flow sensor (>10 LPM). Our LCP flow sensor shows a favourable response in a large flow range (8–160 LPM) with a sensitivity of detecting a linear voltage response of 0.004 V per 1 LPM flow rate. With minimum detectable flow, high sensitivity and resolution, we further demonstrated our LCP flow sensor for detecting human respiration. Moreover, using a two- dimensional simulation in COMSOL Multiphysics, we demonstrated the deformation of LCP membrane in response to different flow velocities which leads to resistance change in sensor's strain gauge.	en_US
dc.relation.ispartof	Sensors and Actuators, A: Physical	en_US
dc.relation.isbasedon	10.1016/j.sna.2018.06.038	en_US
dc.subject.classification	Nanoscience & Nanotechnology	en_US
dc.title	MEMS piezoresistive flow sensors for sleep apnea therapy	en_US
dc.type	Journal Article
utslib.citation.volume	279	en_US
utslib.for	0906 Electrical and Electronic Engineering	en_US
utslib.for	0912 Materials Engineering	en_US
utslib.for	0913 Mechanical Engineering	en_US
pubs.embargo.period	Not known	en_US
pubs.organisational-group	/University of Technology Sydney
pubs.organisational-group	/University of Technology Sydney/Faculty of Engineering and Information Technology
pubs.organisational-group	/University of Technology Sydney/Faculty of Engineering and Information Technology/School of Biomedical Engineering
pubs.organisational-group	/University of Technology Sydney/Faculty of Science
pubs.organisational-group	/University of Technology Sydney/Faculty of Science/School of Mathematical and Physical Sciences
pubs.organisational-group	/University of Technology Sydney/Strength - CHT - Health Technologies
pubs.organisational-group	/University of Technology Sydney/Strength - IBMD - Initiative for Biomedical Devices
utslib.copyright.status	closed_access
pubs.publication-status	Published	en_US
pubs.volume	279	en_US

Abstract:

© 2018 Elsevier B.V. A MEMS liquid crystal polymer (LCP), used in the membrane-based pressure sensor, has been found highly useful as a flow sensor. Here we conducted a set of elaborate experiments using an air flow generator to investigate the potential of our LCP flow sensor for sleep apnea therapy. Critical properties of the LCP flow sensor, including flow range, resolution (sensitivity), accuracy, and response time, have been systematically characterized. As a result, LCP flow sensor achieves a limit of detection of 8 LPM to measure flow rate, better than the commercial flow sensor (>10 LPM). Our LCP flow sensor shows a favourable response in a large flow range (8–160 LPM) with a sensitivity of detecting a linear voltage response of 0.004 V per 1 LPM flow rate. With minimum detectable flow, high sensitivity and resolution, we further demonstrated our LCP flow sensor for detecting human respiration. Moreover, using a two- dimensional simulation in COMSOL Multiphysics, we demonstrated the deformation of LCP membrane in response to different flow velocities which leads to resistance change in sensor's strain gauge.

Please use this identifier to cite or link to this item:

http://hdl.handle.net/10453/130617