Three-Dimensional Nanothermistors for Thermal Probing

Sattelkow, J; Fröch, JE; Winkler, R; Hummel, S; Schwalb, C; Plank, H

Three-Dimensional Nanothermistors for Thermal Probing

Sattelkow, J Fröch, JE

Winkler, R Hummel, S Schwalb, C Plank, H

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Publication Type:: Journal Article
Citation:: ACS Applied Materials and Interfaces, 2019
Issue Date:: 2019-01-01

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Field	Value	Language
dc.contributor.author	Sattelkow, J	en_US
dc.contributor.author	Fröch, JE https://orcid.org/0000-0003-1111-9704	en_US
dc.contributor.author	Winkler, R	en_US
dc.contributor.author	Hummel, S	en_US
dc.contributor.author	Schwalb, C	en_US
dc.contributor.author	Plank, H	en_US
dc.date.issued	2019-01-01	en_US
dc.identifier.citation	ACS Applied Materials and Interfaces, 2019	en_US
dc.identifier.issn	1944-8244	en_US
dc.identifier.uri	http://hdl.handle.net/10453/136583
dc.description.abstract	Copyright © 2019 American Chemical Society. Accessing the thermal properties of materials or even full devices is a highly relevant topic in research and development. Along with the ongoing trend toward smaller feature sizes, the demands on appropriate instrumentation to access surface temperatures with high thermal and lateral resolution also increase. Scanning thermal microscopy is one of the most powerful technologies to fulfill this task down to the sub-100 nm regime, which, however, strongly depends on the nanoprobe design. In this study, we introduce a three-dimensional (3D) nanoprobe concept, which acts as a nanothermistor to access surface temperatures. Fabrication of nanobridges is done via 3D nanoprinting using focused electron beams, which allows direct-write fabrication on prestructured, self-sensing cantilever. As individual branch dimensions are in the sub-100 nm regime, mechanical stability is first studied by a combined approach of finite-element simulation and scanning electron microscopy-assisted in situ atomic force microscopy (AFM) measurements. After deriving the design rules for mechanically stable 3D nanobridges with vertical stiffness up to 50 N m-1, a material tuning approach is introduced to increase mechanical wear resistance at the tip apex for high-quality AFM imaging at high scan speeds. Finally, we demonstrate the electrical response in dependence of temperature and find a negative temperature coefficient of -(0.75 ± 0.2) 10-3 K-1 and sensing rates of 30 ± 1 ms K-1 at noise levels of ±0.5 K, which underlines the potential of our concept. ©	en_US
dc.relation.ispartof	ACS Applied Materials and Interfaces	en_US
dc.relation.isbasedon	10.1021/acsami.9b04497	en_US
dc.subject.classification	Nanoscience & Nanotechnology	en_US
dc.title	Three-Dimensional Nanothermistors for Thermal Probing	en_US
dc.type	Journal Article
utslib.for	1007 Nanotechnology	en_US
utslib.for	0303 Macromolecular and Materials Chemistry	en_US
utslib.for	03 Chemical Sciences	en_US
utslib.for	09 Engineering	en_US
pubs.embargo.period	Not known	en_US
pubs.organisational-group	/University of Technology Sydney
pubs.organisational-group	/University of Technology Sydney/Faculty of Science
pubs.organisational-group	/University of Technology Sydney/Students
utslib.copyright.status	closed_access
pubs.publication-status	Published	en_US

Abstract:

Copyright © 2019 American Chemical Society. Accessing the thermal properties of materials or even full devices is a highly relevant topic in research and development. Along with the ongoing trend toward smaller feature sizes, the demands on appropriate instrumentation to access surface temperatures with high thermal and lateral resolution also increase. Scanning thermal microscopy is one of the most powerful technologies to fulfill this task down to the sub-100 nm regime, which, however, strongly depends on the nanoprobe design. In this study, we introduce a three-dimensional (3D) nanoprobe concept, which acts as a nanothermistor to access surface temperatures. Fabrication of nanobridges is done via 3D nanoprinting using focused electron beams, which allows direct-write fabrication on prestructured, self-sensing cantilever. As individual branch dimensions are in the sub-100 nm regime, mechanical stability is first studied by a combined approach of finite-element simulation and scanning electron microscopy-assisted in situ atomic force microscopy (AFM) measurements. After deriving the design rules for mechanically stable 3D nanobridges with vertical stiffness up to 50 N m-1, a material tuning approach is introduced to increase mechanical wear resistance at the tip apex for high-quality AFM imaging at high scan speeds. Finally, we demonstrate the electrical response in dependence of temperature and find a negative temperature coefficient of -(0.75 ± 0.2) 10-3 K-1 and sensing rates of 30 ± 1 ms K-1 at noise levels of ±0.5 K, which underlines the potential of our concept. ©

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http://hdl.handle.net/10453/136583