The fabrication of 2D micromirror with large electromagnetic driving forces

Jiang, B; Peng, M; Liu, Y; Zhou, T; Su, Y

The fabrication of 2D micromirror with large electromagnetic driving forces

Jiang, B Peng, M Liu, Y Zhou, T Su, Y

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Publication Type:: Journal Article
Citation:: Sensors and Actuators, A: Physical, 2019, 286 pp. 163 - 168
Issue Date:: 2019-02-01

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Field	Value	Language
dc.contributor.author	Jiang, B	en_US
dc.contributor.author	Peng, M	en_US
dc.contributor.author	Liu, Y	en_US
dc.contributor.author	Zhou, T	en_US
dc.contributor.author	Su, Y	en_US
dc.date.accessioned	2020-03-17T03:06:17Z
dc.date.available	2020-03-17T03:06:17Z
dc.date.issued	2019-02-01	en_US
dc.identifier.citation	Sensors and Actuators, A: Physical, 2019, 286 pp. 163 - 168	en_US
dc.identifier.issn	0924-4247	en_US
dc.identifier.uri	http://hdl.handle.net/10453/139357
dc.description.abstract	© 2018 The two dimensional micromirror works as a resonant actuator applied in light detection and ranging (LiDAR) devices. A deep embedded coils design was applied here to provide a large micromirror driving force. The paper describes the advantages of the structures through modal and harmonic response analysis. The fabrication process and the parameters for the fabrication of the structure are also mentioned. For the fabrication, deep etching was performed to produce the coil trenches. Electroplating was conducted subsequently and due to different growth speeds, oxide deposited at low-temperature worked as a sacrificial layer for the isolation of adjacent coils after treatment with BOE solutions (HF and NH4F solutions). Metal bridge above the oxide layer are used to form the current loop with the coils. The paper also discusses the stress issues in the fabrication processes which are caused by the different thermal expansion coefficients. The regionalized deposition of both metal and lift-off processes were taken to partially reduce the stress due to metal deposition. The SEM images of the micromirror after fabrication processes are illustrated in the paper. The open-loop sinusoidal signals generated by the signal generator verified that the 3 mm micromirror could be driven with a 5 V voltage. The horizontal and vertical swing angles are ±23.6 and ±5.7 ° respectively.	en_US
dc.relation.ispartof	Sensors and Actuators, A: Physical	en_US
dc.relation.isbasedon	10.1016/j.sna.2018.12.038	en_US
dc.subject.classification	Nanoscience & Nanotechnology	en_US
dc.title	The fabrication of 2D micromirror with large electromagnetic driving forces	en_US
dc.type	Journal Article
utslib.citation.volume	286	en_US
utslib.for	0906 Electrical and Electronic Engineering	en_US
utslib.for	0912 Materials Engineering	en_US
utslib.for	0913 Mechanical Engineering	en_US
pubs.embargo.period	Not known	en_US
pubs.organisational-group	/University of Technology Sydney
pubs.organisational-group	/University of Technology Sydney/Faculty of Science
pubs.organisational-group	/University of Technology Sydney/Students
utslib.copyright.status	closed_access
pubs.publication-status	Published	en_US
pubs.volume	286	en_US

Abstract:

© 2018 The two dimensional micromirror works as a resonant actuator applied in light detection and ranging (LiDAR) devices. A deep embedded coils design was applied here to provide a large micromirror driving force. The paper describes the advantages of the structures through modal and harmonic response analysis. The fabrication process and the parameters for the fabrication of the structure are also mentioned. For the fabrication, deep etching was performed to produce the coil trenches. Electroplating was conducted subsequently and due to different growth speeds, oxide deposited at low-temperature worked as a sacrificial layer for the isolation of adjacent coils after treatment with BOE solutions (HF and NH4F solutions). Metal bridge above the oxide layer are used to form the current loop with the coils. The paper also discusses the stress issues in the fabrication processes which are caused by the different thermal expansion coefficients. The regionalized deposition of both metal and lift-off processes were taken to partially reduce the stress due to metal deposition. The SEM images of the micromirror after fabrication processes are illustrated in the paper. The open-loop sinusoidal signals generated by the signal generator verified that the 3 mm micromirror could be driven with a 5 V voltage. The horizontal and vertical swing angles are ±23.6 and ±5.7 ° respectively.

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http://hdl.handle.net/10453/139357