The fabrication of 2D micromirror with large electromagnetic driving forces

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Journal Article
Sensors and Actuators, A: Physical, 2019, 286 pp. 163 - 168
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© 2018 The two dimensional micromirror works as a resonant actuator applied in light detection and ranging (LiDAR) devices. A deep embedded coils design was applied here to provide a large micromirror driving force. The paper describes the advantages of the structures through modal and harmonic response analysis. The fabrication process and the parameters for the fabrication of the structure are also mentioned. For the fabrication, deep etching was performed to produce the coil trenches. Electroplating was conducted subsequently and due to different growth speeds, oxide deposited at low-temperature worked as a sacrificial layer for the isolation of adjacent coils after treatment with BOE solutions (HF and NH4F solutions). Metal bridge above the oxide layer are used to form the current loop with the coils. The paper also discusses the stress issues in the fabrication processes which are caused by the different thermal expansion coefficients. The regionalized deposition of both metal and lift-off processes were taken to partially reduce the stress due to metal deposition. The SEM images of the micromirror after fabrication processes are illustrated in the paper. The open-loop sinusoidal signals generated by the signal generator verified that the 3 mm micromirror could be driven with a 5 V voltage. The horizontal and vertical swing angles are ±23.6 and ±5.7 ° respectively.
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