Size Dependent Optical Properties Of Si Quantum Dots In Si-Rich Nitride/Si(3)N(4) Superlattice Synthesized By Magnetron Sputtering

Amer Inst Physics
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Journal Article
Journal Of Applied Physics, 2011, 109 (6), pp. 1 - 5
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A spectroscopic ellipsometry compatible approach is reported for the optical study of Si quantum dots (QDs) in Si-rich nitride/silicon nitride (SRN/Si(3)N(4)) superlattice, which based on Tauc-Lorentz model and Bruggeman effective medium approximation. I
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