Gas cascade amplification in ultra-high-resolution environmental scanning electron microcopy

Toth, M; Thiel, BL; Knowles, WR

Gas cascade amplification in ultra-high-resolution environmental scanning electron microcopy

Toth, M

Thiel, BL Knowles, WR

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Publication Type:: Journal Article
Citation:: Microscopy and Microanalysis, 2010, 16 (6), pp. 805 - 809
Issue Date:: 2010-12-01

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Field	Value	Language
dc.contributor.author	Toth, M https://orcid.org/0000-0003-1564-4899	en_US
dc.contributor.author	Thiel, BL	en_US
dc.contributor.author	Knowles, WR	en_US
dc.date.issued	2010-12-01	en_US
dc.identifier.citation	Microscopy and Microanalysis, 2010, 16 (6), pp. 805 - 809	en_US
dc.identifier.issn	1431-9276	en_US
dc.identifier.uri	http://hdl.handle.net/10453/14593
dc.description.abstract	We describe a feedback mechanism in the gas cascade amplification process used in magnetic immersion lens environmental scanning electron microcopy (ESEM). Feedback dominates gas gain under the conditions typically used for ultra-high-resolution ESEM and gives rise to novel dependencies of the imaging signal and noise on microscope operating parameters. It is ascribed tentatively to the generation of free electrons upon de-excitation of metastable species in the gas cascade. The results have implications for optimization of ESEM systems for applications such as critical dimension metrology and real-time imaging of nanostructure growth by gas mediated electron beam induced deposition. © Microscopy Society of America 2010.	en_US
dc.relation.ispartof	Microscopy and Microanalysis	en_US
dc.relation.isbasedon	10.1017/S1431927610000425	en_US
dc.subject.classification	Microscopy	en_US
dc.title	Gas cascade amplification in ultra-high-resolution environmental scanning electron microcopy	en_US
dc.type	Journal Article
utslib.citation.volume	6	en_US
utslib.citation.volume	16	en_US
utslib.for	0204 Condensed Matter Physics	en_US
utslib.for	0601 Biochemistry and Cell Biology	en_US
utslib.for	0912 Materials Engineering	en_US
dc.location.activity	WOS:000284715300017	en_US
dc.location.activity	WOS:000288756900015
pubs.embargo.period	Not known	en_US
pubs.organisational-group	/University of Technology Sydney
pubs.organisational-group	/University of Technology Sydney/Faculty of Science
pubs.organisational-group	/University of Technology Sydney/Faculty of Science/School of Mathematical and Physical Sciences
pubs.organisational-group	/University of Technology Sydney/Strength - IBMD - Initiative for Biomedical Devices
pubs.organisational-group	/University of Technology Sydney/Strength - MTEE - Research Centre Materials and Technology for Energy Efficiency
utslib.copyright.status	open_access
pubs.issue	6	en_US
pubs.publication-status	Published	en_US
pubs.volume	16	en_US

Abstract:

We describe a feedback mechanism in the gas cascade amplification process used in magnetic immersion lens environmental scanning electron microcopy (ESEM). Feedback dominates gas gain under the conditions typically used for ultra-high-resolution ESEM and gives rise to novel dependencies of the imaging signal and noise on microscope operating parameters. It is ascribed tentatively to the generation of free electrons upon de-excitation of metastable species in the gas cascade. The results have implications for optimization of ESEM systems for applications such as critical dimension metrology and real-time imaging of nanostructure growth by gas mediated electron beam induced deposition. © Microscopy Society of America 2010.

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http://hdl.handle.net/10453/14593