Fabrication of Photonic Resonators in Bulk 4H‐SiC

Schaeper, OC; Fröch, JE; Kim, S; Mu, Z; Toth, M; Gao, W; Aharonovich, I

Fabrication of Photonic Resonators in Bulk 4H‐SiC

Schaeper, OC Fröch, JE Kim, S Mu, Z Toth, M

Gao, W Aharonovich, I

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Publisher:: Wiley
Publication Type:: Journal Article
Citation:: Advanced Materials Technologies, 2021, 6, (11), pp. 2100589
Issue Date:: 2021-07-01

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Field	Value	Language
dc.contributor.author	Schaeper, OC
dc.contributor.author	Fröch, JE
dc.contributor.author	Kim, S
dc.contributor.author	Mu, Z
dc.contributor.author	Toth, M https://orcid.org/0000-0003-1564-4899
dc.contributor.author	Gao, W
dc.contributor.author	Aharonovich, I https://orcid.org/0000-0003-4304-3935
dc.date.accessioned	2022-01-14T01:48:52Z
dc.date.available	2022-01-14T01:48:52Z
dc.date.issued	2021-07-01
dc.identifier.citation	Advanced Materials Technologies, 2021, 6, (11), pp. 2100589
dc.identifier.issn	2365-709X
dc.identifier.issn	2365-709X
dc.identifier.uri	http://hdl.handle.net/10453/153101
dc.description.abstract	The design and engineering of photonic architectures, suitable to enhance, collect and guide light on chip is needed for applications in quantum photonics and quantum optomechanics. In this work, a Faraday cage-based oblique angle etch method is applied to fabricate various functional photonic devices from 4H Silicon Carbide (SiC)—a material that has attracted attention in recent years, due to its potential in optomechanics, nonlinear optics, and quantum information. The processing conditions are detailed and the geometrical and optical characteristics of the fabricated devices are thoroughly addressed. Employing photoluminescence measurements high-quality factors are demonstrated for suspended microring resonators of up to 3500 in the visible range. Such devices will be applicable in the future to augment the properties of SiC in integrated on chip quantum photonics.
dc.language	en
dc.publisher	Wiley
dc.relation	http://purl.org/au-research/grants/arc/CE200100010
dc.relation.ispartof	Advanced Materials Technologies
dc.relation.isbasedon	10.1002/admt.202100589
dc.rights	info:eu-repo/semantics/closedAccess
dc.title	Fabrication of Photonic Resonators in Bulk 4H‐SiC
dc.type	Journal Article
utslib.citation.volume	6
pubs.organisational-group	/University of Technology Sydney
pubs.organisational-group	/University of Technology Sydney/Faculty of Science
pubs.organisational-group	/University of Technology Sydney/Strength - MTEE - Research Centre Materials and Technology for Energy Efficiency
pubs.organisational-group	/University of Technology Sydney/Faculty of Science/School of Mathematical and Physical Sciences
utslib.copyright.status	closed_access	*
dc.date.updated	2022-01-14T01:48:51Z
pubs.issue	11
pubs.publication-status	Published
pubs.volume	6
utslib.citation.issue	11

Abstract:

The design and engineering of photonic architectures, suitable to enhance, collect and guide light on chip is needed for applications in quantum photonics and quantum optomechanics. In this work, a Faraday cage-based oblique angle etch method is applied to fabricate various functional photonic devices from 4H Silicon Carbide (SiC)—a material that has attracted attention in recent years, due to its potential in optomechanics, nonlinear optics, and quantum information. The processing conditions are detailed and the geometrical and optical characteristics of the fabricated devices are thoroughly addressed. Employing photoluminescence measurements high-quality factors are demonstrated for suspended microring resonators of up to 3500 in the visible range. Such devices will be applicable in the future to augment the properties of SiC in integrated on chip quantum photonics.

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http://hdl.handle.net/10453/153101