Nanofabrication of high Q, transferable, diamond resonators

Regan, BEP; Trycz, A; Fröch, J; Schaeper, O; Kim, S; Aharonovich, I

Nanofabrication of high Q, transferable, diamond resonators

Regan, BEP Trycz, A Fröch, J Schaeper, O Kim, S Aharonovich, I

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Publisher:: ROYAL SOC CHEMISTRY
Publication Type:: Journal Article
Citation:: Nanoscale, 2021, 13, (19), pp. 8848-8854
Issue Date:: 2021-01-01

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Field	Value	Language
dc.contributor.author	Regan, BEP
dc.contributor.author	Trycz, A
dc.contributor.author	Fröch, J
dc.contributor.author	Schaeper, O
dc.contributor.author	Kim, S
dc.contributor.author	Aharonovich, I https://orcid.org/0000-0003-4304-3935
dc.date.accessioned	2022-03-29T06:54:44Z
dc.date.available	2022-03-29T06:54:44Z
dc.date.issued	2021-01-01
dc.identifier.citation	Nanoscale, 2021, 13, (19), pp. 8848-8854
dc.identifier.issn	2040-3364
dc.identifier.issn	2040-3372
dc.identifier.uri	http://hdl.handle.net/10453/155669
dc.description.abstract	Advancement of diamond based photonic circuitry requires robust fabrication protocols of key components - including diamond resonators and cavities. Here, we present 1D (nanobeam) photonic crystal cavities generated from single crystal diamond membranes utilising a metallic tungsten layer as a restraining, conductive and removable hard mask. The use of tungsten instead of a more conventional silicon oxide layer enables good repeatability and reliability of the fabrication procedures. The process yields high quality diamond cavities with quality factors (Q-factors) approaching 1 × 104. Finally, we show that the cavities can be picked up and transferred onto a trenched substrate to realise fully suspended diamond cavities. Our fabrication process demonstrates the capability of diamond membranes as modular components for broader diamond based quantum photonic circuitry.
dc.format	Print
dc.language	eng
dc.publisher	ROYAL SOC CHEMISTRY
dc.relation	http://purl.org/au-research/grants/arc/DP180100077
dc.relation	http://purl.org/au-research/grants/arc/CE200100010
dc.relation.ispartof	Nanoscale
dc.relation.isbasedon	10.1039/d1nr00749a
dc.rights	info:eu-repo/semantics/openAccess
dc.subject	02 Physical Sciences, 03 Chemical Sciences, 10 Technology
dc.subject.classification	Nanoscience & Nanotechnology
dc.title	Nanofabrication of high Q, transferable, diamond resonators
dc.type	Journal Article
utslib.citation.volume	13
utslib.location.activity	England
utslib.for	02 Physical Sciences
utslib.for	03 Chemical Sciences
utslib.for	10 Technology
pubs.organisational-group	/University of Technology Sydney
pubs.organisational-group	/University of Technology Sydney/Faculty of Science
pubs.organisational-group	/University of Technology Sydney/Faculty of Science/School of Mathematical and Physical Sciences
utslib.copyright.status	open_access	*
dc.date.updated	2022-03-29T06:54:42Z
pubs.issue	19
pubs.publication-status	Published
pubs.volume	13
utslib.citation.issue	19

Abstract:

Advancement of diamond based photonic circuitry requires robust fabrication protocols of key components - including diamond resonators and cavities. Here, we present 1D (nanobeam) photonic crystal cavities generated from single crystal diamond membranes utilising a metallic tungsten layer as a restraining, conductive and removable hard mask. The use of tungsten instead of a more conventional silicon oxide layer enables good repeatability and reliability of the fabrication procedures. The process yields high quality diamond cavities with quality factors (Q-factors) approaching 1 × 104. Finally, we show that the cavities can be picked up and transferred onto a trenched substrate to realise fully suspended diamond cavities. Our fabrication process demonstrates the capability of diamond membranes as modular components for broader diamond based quantum photonic circuitry.

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http://hdl.handle.net/10453/155669