Charged Particle Induced Etching and Functionalization of Two-Dimensional Materials

Elbadawi, C; Kianinia, M; Bendavid, A; Lobo, CJ

Charged Particle Induced Etching and Functionalization of Two-Dimensional Materials

Elbadawi, C Kianinia, M

Bendavid, A Lobo, CJ

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Publisher:: ELECTROCHEMICAL SOC INC
Publication Type:: Journal Article
Citation:: ECS Journal of Solid State Science and Technology, 2022, 11, (3)
Issue Date:: 2022-03-01

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Field	Value	Language
dc.contributor.author	Elbadawi, C
dc.contributor.author	Kianinia, M https://orcid.org/0000-0003-4073-1492
dc.contributor.author	Bendavid, A
dc.contributor.author	Lobo, CJ
dc.date.accessioned	2022-06-20T06:18:34Z
dc.date.available	2022-06-20T06:18:34Z
dc.date.issued	2022-03-01
dc.identifier.citation	ECS Journal of Solid State Science and Technology, 2022, 11, (3)
dc.identifier.issn	2162-8769
dc.identifier.issn	2162-8777
dc.identifier.uri	http://hdl.handle.net/10453/158267
dc.description.abstract	Focused electron beam induced deposition and etching (FEBID and FEBIE) are direct-write nanofabrication techniques in which an electron beam is used to achieve nanostructure functionalization, etching or deposition. Either alone or in combination with in situ plasmas, these techniques can also be used to accelerate reactions that occur in ambient environment, with simultaneous high-resolution imaging. Here, we describe our recent work on etching, functionalization and directed assembly of a range of nanoand two-dimensional materials using temperature-dependent FEBIE experiments in an environmental scanning electron microscope (ESEM). As examples of the application of these techniques, we demonstrate processes for assembling arrays of nanodiamonds that can be used as magnetic field sensors, as well as for controlled etching of hexagonal boron nitride (hBN) and black phosphorus (BP).
dc.language	English
dc.publisher	ELECTROCHEMICAL SOC INC
dc.relation.ispartof	ECS Journal of Solid State Science and Technology
dc.relation.isbasedon	10.1149/2162-8777/ac5eb2
dc.rights	info:eu-repo/semantics/openAccess
dc.rights	'This is an author-created, un-copyedited version of an article accepted for publication in ECS Journal of Solid State Science and Technology. IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The definitive publisher-authenticated version is available online at 10.1149/2162-8777/ac5eb2.'
dc.subject	0204 Condensed Matter Physics, 0306 Physical Chemistry (incl. Structural)
dc.title	Charged Particle Induced Etching and Functionalization of Two-Dimensional Materials
dc.type	Journal Article
utslib.citation.volume	11
utslib.for	0204 Condensed Matter Physics
utslib.for	0306 Physical Chemistry (incl. Structural)
pubs.organisational-group	/University of Technology Sydney
pubs.organisational-group	/University of Technology Sydney/Faculty of Science
pubs.organisational-group	/University of Technology Sydney/Faculty of Science/School of Mathematical and Physical Sciences
utslib.copyright.status	open_access	*
dc.date.updated	2022-06-20T06:18:33Z
pubs.issue	3
pubs.publication-status	Published
pubs.volume	11
utslib.citation.issue	3

Abstract:

Focused electron beam induced deposition and etching (FEBID and FEBIE) are direct-write nanofabrication techniques in which an electron beam is used to achieve nanostructure functionalization, etching or deposition. Either alone or in combination with in situ plasmas, these techniques can also be used to accelerate reactions that occur in ambient environment, with simultaneous high-resolution imaging. Here, we describe our recent work on etching, functionalization and directed assembly of a range of nanoand two-dimensional materials using temperature-dependent FEBIE experiments in an environmental scanning electron microscope (ESEM). As examples of the application of these techniques, we demonstrate processes for assembling arrays of nanodiamonds that can be used as magnetic field sensors, as well as for controlled etching of hexagonal boron nitride (hBN) and black phosphorus (BP).

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http://hdl.handle.net/10453/158267