High power and high capacity 3D-Structured TiO<inf>2</inf> electrodes for lithium-ion microbatteries

Xie, J; Oudenhoven, JFM; Li, D; Chen, C; Eichel, RA; Notten, PHL

High power and high capacity 3D-Structured TiO<inf>2</inf> electrodes for lithium-ion microbatteries

Xie, J Oudenhoven, JFM Li, D Chen, C Eichel, RA Notten, PHL

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Publisher:: The Electrochemical Society
Publication Type:: Journal Article
Citation:: Journal of the Electrochemical Society, 2016, 163, (10), pp. A2385-A2389
Issue Date:: 2016-01-01

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Field	Value	Language
dc.contributor.author	Xie, J
dc.contributor.author	Oudenhoven, JFM
dc.contributor.author	Li, D
dc.contributor.author	Chen, C
dc.contributor.author	Eichel, RA
dc.contributor.author	Notten, PHL
dc.date.accessioned	2022-08-21T20:27:54Z
dc.date.available	2022-08-21T20:27:54Z
dc.date.issued	2016-01-01
dc.identifier.citation	Journal of the Electrochemical Society, 2016, 163, (10), pp. A2385-A2389
dc.identifier.issn	0013-4651
dc.identifier.issn	1945-7111
dc.identifier.uri	http://hdl.handle.net/10453/160603
dc.description.abstract	An on-chip compatible method to fabricate high energy density TiO2 thin film electrodes on 3D-structured silicon substrates was demonstrated. 3D-structured electrodes are fabricated by combining reactive ion etching (RIE) with low pressure chemical vapor deposition (LPCVD), enabling accurate control of the aspect ratio of substrates and the subsequent deposition of TiO2 thin film electrodes onto these structured substrates. The prepared 3D-TiO2 electrodes exhibit a current-dependent increase in storage capacity of a factor up to 16 as compared to conventional planar electrodes. In addition, these 3D electrodes also reveal excellent power and cycling performance. This work demonstrates that LPCVD is capable of depositing homogeneous film electrodes on highly structured substrates and the prepared 3D-electrodes also shows significant improve in storage capacity and power density.
dc.language	en
dc.publisher	The Electrochemical Society
dc.relation.ispartof	Journal of the Electrochemical Society
dc.relation.isbasedon	10.1149/2.1141610jes
dc.rights	info:eu-repo/semantics/openAccess
dc.subject	0303 Macromolecular and Materials Chemistry, 0306 Physical Chemistry (incl. Structural), 0912 Materials Engineering
dc.subject.classification	Energy
dc.title	High power and high capacity 3D-Structured TiO<inf>2</inf> electrodes for lithium-ion microbatteries
dc.type	Journal Article
utslib.citation.volume	163
utslib.for	0303 Macromolecular and Materials Chemistry
utslib.for	0306 Physical Chemistry (incl. Structural)
utslib.for	0912 Materials Engineering
pubs.organisational-group	/University of Technology Sydney
pubs.organisational-group	/University of Technology Sydney/Faculty of Science
pubs.organisational-group	/University of Technology Sydney/Faculty of Science/School of Mathematical and Physical Sciences
utslib.copyright.status	open_access	*
dc.date.updated	2022-08-21T20:27:53Z
pubs.issue	10
pubs.publication-status	Published
pubs.volume	163
utslib.citation.issue	10

Abstract:

An on-chip compatible method to fabricate high energy density TiO2 thin film electrodes on 3D-structured silicon substrates was demonstrated. 3D-structured electrodes are fabricated by combining reactive ion etching (RIE) with low pressure chemical vapor deposition (LPCVD), enabling accurate control of the aspect ratio of substrates and the subsequent deposition of TiO2 thin film electrodes onto these structured substrates. The prepared 3D-TiO2 electrodes exhibit a current-dependent increase in storage capacity of a factor up to 16 as compared to conventional planar electrodes. In addition, these 3D electrodes also reveal excellent power and cycling performance. This work demonstrates that LPCVD is capable of depositing homogeneous film electrodes on highly structured substrates and the prepared 3D-electrodes also shows significant improve in storage capacity and power density.

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http://hdl.handle.net/10453/160603