Metal-organic chemical vapor deposition enabling all-solid-state Li-ion microbatteries: A short review

Chen, C; Eichel, RA; Notten, PHL

Metal-organic chemical vapor deposition enabling all-solid-state Li-ion microbatteries: A short review

Chen, C Eichel, RA Notten, PHL

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Publisher:: SPRINGER
Publication Type:: Journal Article
Citation:: Journal of Electroceramics, 2017, 38, (2-4), pp. 230-247
Issue Date:: 2017-06-01

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Field	Value	Language
dc.contributor.author	Chen, C
dc.contributor.author	Eichel, RA
dc.contributor.author	Notten, PHL
dc.date.accessioned	2022-09-23T01:00:16Z
dc.date.available	2022-09-23T01:00:16Z
dc.date.issued	2017-06-01
dc.identifier.citation	Journal of Electroceramics, 2017, 38, (2-4), pp. 230-247
dc.identifier.issn	1385-3449
dc.identifier.issn	1573-8663
dc.identifier.uri	http://hdl.handle.net/10453/162027
dc.description.abstract	For powering small-sized electronic devices, all-solid-state Li-ion batteries are the most promising candidates due to its safety and allowing miniaturization. Thin film deposition methods can be used for building new all-solid-state architectures. Well-known deposition methods are sputter deposition, pulsed laser deposition, sol-gel deposition, atomic layer deposition, etc. This review summarizes thin film storage materials deposited by metal-organic chemical vapor deposition (MOCVD) for all-solid-state Li-ion batteries. The deposition parameters strongly influence the quality of the films, such as surface morphology, composition, electrochemical stability and cycling performance. Some materials have been successfully deposited by MOCVD into 3D–structured substrates, revealing conformal, homogeneous and high performance battery properties.
dc.language	English
dc.publisher	SPRINGER
dc.relation.ispartof	Journal of Electroceramics
dc.relation.isbasedon	10.1007/s10832-017-0090-1
dc.rights	info:eu-repo/semantics/closedAccess
dc.subject	0303 Macromolecular and Materials Chemistry, 0912 Materials Engineering
dc.subject.classification	Materials
dc.title	Metal-organic chemical vapor deposition enabling all-solid-state Li-ion microbatteries: A short review
dc.type	Journal Article
utslib.citation.volume	38
utslib.for	0303 Macromolecular and Materials Chemistry
utslib.for	0912 Materials Engineering
pubs.organisational-group	/University of Technology Sydney
pubs.organisational-group	/University of Technology Sydney/Faculty of Science
pubs.organisational-group	/University of Technology Sydney/Faculty of Science/School of Mathematical and Physical Sciences
utslib.copyright.status	closed_access	*
dc.date.updated	2022-09-23T01:00:12Z
pubs.issue	2-4
pubs.publication-status	Published
pubs.volume	38
utslib.citation.issue	2-4

Abstract:

For powering small-sized electronic devices, all-solid-state Li-ion batteries are the most promising candidates due to its safety and allowing miniaturization. Thin film deposition methods can be used for building new all-solid-state architectures. Well-known deposition methods are sputter deposition, pulsed laser deposition, sol-gel deposition, atomic layer deposition, etc. This review summarizes thin film storage materials deposited by metal-organic chemical vapor deposition (MOCVD) for all-solid-state Li-ion batteries. The deposition parameters strongly influence the quality of the films, such as surface morphology, composition, electrochemical stability and cycling performance. Some materials have been successfully deposited by MOCVD into 3D–structured substrates, revealing conformal, homogeneous and high performance battery properties.

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http://hdl.handle.net/10453/162027