High-density individually addressable platinum nanoelectrodes for biomedical applications

Raj, V; Gopakumar, A; Vaidya, G; Scott, J; Toth, M; Jagadish, C; Gautam, V

High-density individually addressable platinum nanoelectrodes for biomedical applications

Raj, V Gopakumar, A Vaidya, G Scott, J

Toth, M

Jagadish, C Gautam, V

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Publisher:: Springer Nature
Publication Type:: Journal Article
Citation:: Discover Materials, 2022, 2, (1), pp. 6
Issue Date:: 2022-06-13

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Field	Value	Language
dc.contributor.author	Raj, V
dc.contributor.author	Gopakumar, A
dc.contributor.author	Vaidya, G
dc.contributor.author	Scott, J https://orcid.org/0000-0002-3972-4351
dc.contributor.author	Toth, M https://orcid.org/0000-0003-1564-4899
dc.contributor.author	Jagadish, C
dc.contributor.author	Gautam, V
dc.date.accessioned	2023-06-19T21:55:46Z
dc.date.available	2023-06-19T21:55:46Z
dc.date.issued	2022-06-13
dc.identifier.citation	Discover Materials, 2022, 2, (1), pp. 6
dc.identifier.issn	2730-7727
dc.identifier.issn	2730-7727
dc.identifier.uri	http://hdl.handle.net/10453/170800
dc.description.abstract	Abstract3-D vertical nanoelectrode arrays (NEAs) have found applications in several biomedical and sensing applications, including high-resolution neuronal excitation and measurement and single-molecule electrochemical biosensing. There have been several reports on high-density nanoelectrodes in recent years, with the filling ratio of electrodes reaching close to 0.002 (assuming the electrode diameter of 200 nm and pitch of 4 μm). Still, it is well below the nanowire filling ratio required to form interconnected neuronal networks, i.e., more than 0.14 (assuming the electrode diameter of 200 nm and pitch of 1.5 μm). Here, we employ a multi-step, large-area electron beam lithography procedure along with a targeted, focused ion beam based metal deposition technique to realize an individually addressable, 60-channel nanoelectrode chip with a filling ratio as high as 0.16, which is well within the limit required for the formation of interconnected neuronal networks. Moreover, we have designed the NEA chip to be compatible with the commercially available MEA2100-System, which can, in the future, enable the chip to be readily used for obtaining data from individual electrodes. We also perform an in-depth electrochemical impedance spectroscopy characterization to show that the electrochemical behavior and the charge transfer mechanism in the array are significantly influenced by changing the thickness of the SU-8 planarization layer (i.e., the thickness of the exposed platinum surface). In addition to neural signal excitation and measurement, we propose that these NEA chips have the potential for other future applications, such as high-resolution single-molecule level electrochemical and bio-analyte sensing.
dc.language	en
dc.publisher	Springer Nature
dc.relation.ispartof	Discover Materials
dc.relation.isbasedon	10.1007/s43939-022-00027-1
dc.rights	info:eu-repo/semantics/openAccess
dc.title	High-density individually addressable platinum nanoelectrodes for biomedical applications
dc.type	Journal Article
utslib.citation.volume	2
pubs.organisational-group	/University of Technology Sydney
pubs.organisational-group	/University of Technology Sydney/Faculty of Science
pubs.organisational-group	/University of Technology Sydney/Strength - MTEE - Research Centre Materials and Technology for Energy Efficiency
pubs.organisational-group	/University of Technology Sydney/Faculty of Science/School of Mathematical and Physical Sciences
utslib.copyright.status	open_access	*
dc.date.updated	2023-06-19T21:55:41Z
pubs.issue	1
pubs.publication-status	Published
pubs.volume	2
utslib.citation.issue	1

Abstract:

Abstract3-D vertical nanoelectrode arrays (NEAs) have found applications in several biomedical and sensing applications, including high-resolution neuronal excitation and measurement and single-molecule electrochemical biosensing. There have been several reports on high-density nanoelectrodes in recent years, with the filling ratio of electrodes reaching close to 0.002 (assuming the electrode diameter of 200 nm and pitch of 4 μm). Still, it is well below the nanowire filling ratio required to form interconnected neuronal networks, i.e., more than 0.14 (assuming the electrode diameter of 200 nm and pitch of 1.5 μm). Here, we employ a multi-step, large-area electron beam lithography procedure along with a targeted, focused ion beam based metal deposition technique to realize an individually addressable, 60-channel nanoelectrode chip with a filling ratio as high as 0.16, which is well within the limit required for the formation of interconnected neuronal networks. Moreover, we have designed the NEA chip to be compatible with the commercially available MEA2100-System, which can, in the future, enable the chip to be readily used for obtaining data from individual electrodes. We also perform an in-depth electrochemical impedance spectroscopy characterization to show that the electrochemical behavior and the charge transfer mechanism in the array are significantly influenced by changing the thickness of the SU-8 planarization layer (i.e., the thickness of the exposed platinum surface). In addition to neural signal excitation and measurement, we propose that these NEA chips have the potential for other future applications, such as high-resolution single-molecule level electrochemical and bio-analyte sensing.

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http://hdl.handle.net/10453/170800