Fabrication and characterization of silicon woodpile photonic crystals with a complete bandgap at telecom wavelengths

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Journal Article
Optics Letters, 2010, 35 (7), pp. 1094 - 1096
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By using direct laser writing into a novel commercially available photoresist and a silicon-double-inversion procedure followed by tempering of the silicon structures, we realize high-quality centered-tetragonal woodpile photonic crystals with complete photonic bandgaps near 1.55 μm wavelength. The 6.9% gap-to-midgap ratio bandgap is evidenced by the comparison of measured transmittance and reflectance spectra with bandstructure and scattering-matrix calculations. © 2010 Optical Society of America.
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