Monocrystalline ZnO films grown by atomic layer epitaxy - growth and characterisation

Wiley VCH
Publication Type:
Journal Article
Physica Status Solidi C, 2004, 1 (4), pp. 892 - 895
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We report successful growth of thin films ZnO by atomic layer epitaxy (ALE). Properties of the ZnO films grown by ALE on GaN/sapphire are described in relation to those grown by the same sequential procedure on uncoated sapphire and glass substrates.
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