Magnetron co-sputtering of nanostructured chromium aluminium nitride coatings

Trans Tech Publications Ltd
Publication Type:
Journal Article
Materials Science Forum, 2005, 475-479 pp. 4001 - 4004
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Ternary chromium aluminium nitride (Cr,Al)N coatings were produced by reactive magnetron co-sputtering technique at different nitrogen deposition pressures. Densified nanostructured coatings with grain size below 100 nm were obtained under critically con
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