Nitride film growth morphology using remote plasma enhanced chemical vapor deposition

Publisher:
WILEY-V C H VERLAG GMBH
Publication Type:
Journal Article
Citation:
PHYSICA STATUS SOLIDI C - CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 4 NO 7 2007, 2007, 4 (7), pp. 2285 - + (2)
Issue Date:
2007-01-01
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