Gas-mediated charged particle beam processing of nanostructured materials
- Publication Type:
- Conference Proceeding
- Proceedings of SPIE - The International Society for Optical Engineering, 2014, 8970
- Issue Date:
Gas mediated processing under a charged particle (electron or ion) beam enables direct-write, high resolution surface functionalization, chemical dry etching and chemical vapor deposition of a wide range of materials including catalytic metals, optoelectronic grade semiconductors and oxides. Here we highlight three recent developments of particular interest to the optical materials and nanofabrication communities: fabrication of self-supporting, three dimensional, fluorescent diamond nanostructures, electron beam induced deposition (EBID) of high purity materials via activated chemisorption, and post-growth purification of nanocrystalline EBID-grown platinum suitable for catalysis applications. © 2014 SPIE.
Please use this identifier to cite or link to this item: