Gas-mediated charged particle beam processing of nanostructured materials

Lobo, CJ; Martin, AA; Elbadawi, C; Bishop, J; Aharonovich, I; Toth, M

Gas-mediated charged particle beam processing of nanostructured materials

Lobo, CJ

Martin, AA

Elbadawi, C Bishop, J Aharonovich, I

Toth, M

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Publication Type:: Conference Proceeding
Citation:: Proceedings of SPIE - The International Society for Optical Engineering, 2014, 8970
Issue Date:: 2014-01-01

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Field	Value	Language
dc.contributor.author	Lobo, CJ https://orcid.org/0000-0002-2746-1363	en_US
dc.contributor.author	Martin, AA https://orcid.org/0000-0003-2362-5524	en_US
dc.contributor.author	Elbadawi, C	en_US
dc.contributor.author	Bishop, J	en_US
dc.contributor.author	Aharonovich, I https://orcid.org/0000-0003-4304-3935	en_US
dc.contributor.author	Toth, M https://orcid.org/0000-0003-1564-4899	en_US
dc.date.issued	2014-01-01	en_US
dc.identifier.citation	Proceedings of SPIE - The International Society for Optical Engineering, 2014, 8970	en_US
dc.identifier.isbn	9780819498830	en_US
dc.identifier.issn	0277-786X	en_US
dc.identifier.uri	http://hdl.handle.net/10453/35845
dc.description.abstract	Gas mediated processing under a charged particle (electron or ion) beam enables direct-write, high resolution surface functionalization, chemical dry etching and chemical vapor deposition of a wide range of materials including catalytic metals, optoelectronic grade semiconductors and oxides. Here we highlight three recent developments of particular interest to the optical materials and nanofabrication communities: fabrication of self-supporting, three dimensional, fluorescent diamond nanostructures, electron beam induced deposition (EBID) of high purity materials via activated chemisorption, and post-growth purification of nanocrystalline EBID-grown platinum suitable for catalysis applications. © 2014 SPIE.	en_US
dc.relation.ispartof	Proceedings of SPIE - The International Society for Optical Engineering	en_US
dc.relation.isbasedon	10.1117/12.2042021	en_US
dc.title	Gas-mediated charged particle beam processing of nanostructured materials	en_US
dc.type	Conference Proceeding
utslib.citation.volume	8970	en_US
utslib.for	1007 Nanotechnology	en_US
pubs.embargo.period	Not known	en_US
pubs.organisational-group	/University of Technology Sydney
pubs.organisational-group	/University of Technology Sydney/Faculty of Science
pubs.organisational-group	/University of Technology Sydney/Faculty of Science/School of Mathematical and Physical Sciences
pubs.organisational-group	/University of Technology Sydney/Strength - MTEE - Research Centre Materials and Technology for Energy Efficiency
utslib.copyright.status	open_access
pubs.publication-status	Published	en_US
pubs.volume	8970	en_US

Abstract:

Gas mediated processing under a charged particle (electron or ion) beam enables direct-write, high resolution surface functionalization, chemical dry etching and chemical vapor deposition of a wide range of materials including catalytic metals, optoelectronic grade semiconductors and oxides. Here we highlight three recent developments of particular interest to the optical materials and nanofabrication communities: fabrication of self-supporting, three dimensional, fluorescent diamond nanostructures, electron beam induced deposition (EBID) of high purity materials via activated chemisorption, and post-growth purification of nanocrystalline EBID-grown platinum suitable for catalysis applications. © 2014 SPIE.

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http://hdl.handle.net/10453/35845