Atomic layer deposition of thin films of ZnSe - Structural and optical characterization

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Journal Article
Thin Solid Films, 2004, 446 (2), pp. 172 - 177
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Thin films of sphalerite-type ZnSe were grown by atomic layer deposition (ALD) from elemental Zn and Se precursors. These films, grown on various substrates, show bright blue 'edge' emission accompanied by donor-acceptor pair emissions in the blue, green and red spectral regions. Red, green and blue emissions mixed together give a white color, with a color temperature between 2400 and 4500 K depending on a layer thickness and temperature. ZnSe grown by ALD is in consequence a promising material for the fabrication of semiconductor-based white light emitting thin film electroluminescence displays. © 2003 Elsevier B.V. All rights reserved.
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