Atomic layer deposition of thin films of ZnSe - structural and optical characterization

Elsevier Science
Publication Type:
Journal Article
Thin Solid Films, 2004, 446 (2), pp. 172 - 177
Issue Date:
Full metadata record
Files in This Item:
Filename Description Size
Thumbnail2004000055.pdf824.14 kB
Adobe PDF
Thin films of sphalerite-type ZnSe were grown by atomic layer deposition (ALD) from elemental Zn and Se precursors. These films, grown on various substrates, show bright blue `edge emission accompanied by donoracceptor pair emissions in the blue, green and red spectral regions. Red, green and blue emissions mixed together give a white color, with a color temperature between 2400 and 4500 K depending on a layer thickness and temperature. ZnSe grown by ALD is in consequence a promising material for the fabrication of semiconductor-based white light emitting thin film electroluminescence displays.
Please use this identifier to cite or link to this item: