Localized probing of gas molecule adsorption energies and desorption attempt frequencies

Cullen, J; Bahm, A; Lobo, CJ; Ford, MJ; Toth, M

Localized probing of gas molecule adsorption energies and desorption attempt frequencies

Cullen, J Bahm, A Lobo, CJ

Ford, MJ

Toth, M

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Publication Type:: Journal Article
Citation:: Journal of Physical Chemistry C, 2015, 119 (28), pp. 15948 - 15953
Issue Date:: 2015-07-16

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Field	Value	Language
dc.contributor.author	Cullen, J	en_US
dc.contributor.author	Bahm, A	en_US
dc.contributor.author	Lobo, CJ https://orcid.org/0000-0002-2746-1363	en_US
dc.contributor.author	Ford, MJ https://orcid.org/0000-0002-8595-5900	en_US
dc.contributor.author	Toth, M https://orcid.org/0000-0003-1564-4899	en_US
dc.date.issued	2015-07-16	en_US
dc.identifier.citation	Journal of Physical Chemistry C, 2015, 119 (28), pp. 15948 - 15953	en_US
dc.identifier.issn	1932-7447	en_US
dc.identifier.uri	http://hdl.handle.net/10453/37769
dc.description.abstract	© 2015 American Chemical Society. Gas-mediated electron beam induced etching (EBIE) and deposition (EBID) can be used to measure activation energies that are interpreted as the adsorption energies of surface-adsorbed precursor molecules. However, the measured quantities often disagree with adsorption energies measured by conventional analysis techniques such as thermally programmed desorption and have anomalous dependencies on parameters such as the electron beam current used to perform EBID. Here, we use the theory of EBIE and EBID rate kinetics to explain this behavior and identify conditions under which the activation energies and the associated pre-exponential factors correspond to gas molecule adsorption energies and desorption attempt frequencies, respectively. Under these conditions, EBIE and EBID can be used as robust, nanoscale techniques for the analysis of adsorbates.	en_US
dc.relation	http://purl.org/au-research/grants/arc/DP140102721
dc.relation.ispartof	Journal of Physical Chemistry C	en_US
dc.relation.isbasedon	10.1021/acs.jpcc.5b00918	en_US
dc.subject.classification	Physical Chemistry	en_US
dc.title	Localized probing of gas molecule adsorption energies and desorption attempt frequencies	en_US
dc.type	Journal Article
utslib.citation.volume	28	en_US
utslib.citation.volume	119	en_US
utslib.for	0306 Physical Chemistry (incl. Structural)	en_US
utslib.for	0912 Materials Engineering	en_US
utslib.for	03 Chemical Sciences	en_US
utslib.for	09 Engineering	en_US
utslib.for	10 Technology	en_US
pubs.embargo.period	Not known	en_US
pubs.organisational-group	/University of Technology Sydney
pubs.organisational-group	/University of Technology Sydney/DVC (Research)
pubs.organisational-group	/University of Technology Sydney/Faculty of Science
pubs.organisational-group	/University of Technology Sydney/Faculty of Science/School of Mathematical and Physical Sciences
pubs.organisational-group	/University of Technology Sydney/Strength - IBMD - Initiative for Biomedical Devices
pubs.organisational-group	/University of Technology Sydney/Strength - MTEE - Research Centre Materials and Technology for Energy Efficiency
pubs.organisational-group	/University of Technology Sydney/Students
utslib.copyright.status	open_access
pubs.issue	28	en_US
pubs.publication-status	Published	en_US
pubs.volume	119	en_US

Abstract:

© 2015 American Chemical Society. Gas-mediated electron beam induced etching (EBIE) and deposition (EBID) can be used to measure activation energies that are interpreted as the adsorption energies of surface-adsorbed precursor molecules. However, the measured quantities often disagree with adsorption energies measured by conventional analysis techniques such as thermally programmed desorption and have anomalous dependencies on parameters such as the electron beam current used to perform EBID. Here, we use the theory of EBIE and EBID rate kinetics to explain this behavior and identify conditions under which the activation energies and the associated pre-exponential factors correspond to gas molecule adsorption energies and desorption attempt frequencies, respectively. Under these conditions, EBIE and EBID can be used as robust, nanoscale techniques for the analysis of adsorbates.

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http://hdl.handle.net/10453/37769