Monocrystalline thin films of ZnSe and ZnO grown by atomic layer epitaxy

Publication Type:
Journal Article
Citation:
Vacuum, 2004, 74 (2), pp. 269 - 272
Issue Date:
2004-05-24
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We report on the growth of monocrystalline thin films of ZnSe and ZnO by atomic layer epitaxy by simple reaction between elemental precursors. Structural and optical properties of these films are discussed with reference to the investigations performed with atomic force microscopy, scanning electron microscopy, cathodoluminescence and photoluminescence. © 2004 Elsevier Ltd. All rights reserved.
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