Grain refinement with increasing magnetron discharge power in sputter deposition of nanostructured titanium aluminium nitride coatings

Publisher:
PERGAMON-ELSEVIER SCIENCE LTD
Publication Type:
Journal Article
Citation:
SCRIPTA MATERIALIA, 2004, 50 (6), pp. 813 - 818 (6)
Issue Date:
2004-03-01
Metrics:
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