Fabrication and characterisation of ultra-thin tungsten-carbon (W/C) and platinum-carbon (Pt/C) multilayers for X-ray mirrors

Gan, BK; Latella, BA; Cheary, RW

Fabrication and characterisation of ultra-thin tungsten-carbon (W/C) and platinum-carbon (Pt/C) multilayers for X-ray mirrors

Gan, BK Latella, BA Cheary, RW

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Publication Type:: Journal Article
Citation:: Applied Surface Science, 2005, 239 (2), pp. 237 - 245
Issue Date:: 2005-01-15

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Field	Value	Language
dc.contributor.author	Gan, BK	en_US
dc.contributor.author	Latella, BA	en_US
dc.contributor.author	Cheary, RW	en_US
dc.date.issued	2005-01-15	en_US
dc.identifier.citation	Applied Surface Science, 2005, 239 (2), pp. 237 - 245	en_US
dc.identifier.issn	0169-4332	en_US
dc.identifier.uri	http://hdl.handle.net/10453/4297
dc.description.abstract	Ultra-thin tungsten-carbon (W/C) and platinum-carbon (Pt/C) multilayers were fabricated using dc magnetron sputtering. The bilayer period and the total number of layers were varied for both systems to ascertain the X-ray reflectance response. As a preliminary investigation, in situ resistance measurements were made to determine the minimum continuous single layer thickness that could be produced for W and Pt. We used X-ray reflectivity to monitor the reflectance from the first order peaks and the number of layers in the multilayered structures. X-ray photoelectron spectroscopy showed that a distinct intermixing layer develops in both W/C and Pt/C. A repeating four-layer model was developed to characterise the X-ray reflectivity patterns with mixed interface layers. The model accounts for all the essential features in the observed reflectivity data with particular attention given to layer thickness and interfacial roughness. Assessment of the films by indentation indicated that they are mechanically reliable with no cracking events or delamination obvious from the load-displacement curves indicating excellent adhesion. An anomalous improvement in hardness and Young's modulus with increasing number of layers was observed. The present results indicate that high-quality ultra-thin W/C and Pt/C tailored multilayer films produced by dc magnetron sputtering show considerable promise as mirrors for high energy X-ray applications. © 2004 Elsevier B.V. All rights reserved.	en_US
dc.relation.ispartof	Applied Surface Science	en_US
dc.relation.isbasedon	10.1016/j.apsusc.2004.05.269	en_US
dc.subject.classification	Applied Physics	en_US
dc.title	Fabrication and characterisation of ultra-thin tungsten-carbon (W/C) and platinum-carbon (Pt/C) multilayers for X-ray mirrors	en_US
dc.type	Journal Article
utslib.citation.volume	2	en_US
utslib.citation.volume	239	en_US
utslib.for	0204 Condensed Matter Physics	en_US
dc.location.activity	Hongzhou, China
pubs.embargo.period	Not known	en_US
pubs.organisational-group	/University of Technology Sydney
pubs.organisational-group	/University of Technology Sydney/Faculty of Science
utslib.copyright.status	closed_access
pubs.issue	2	en_US
pubs.publication-status	Published	en_US
pubs.volume	239	en_US

Abstract:

Ultra-thin tungsten-carbon (W/C) and platinum-carbon (Pt/C) multilayers were fabricated using dc magnetron sputtering. The bilayer period and the total number of layers were varied for both systems to ascertain the X-ray reflectance response. As a preliminary investigation, in situ resistance measurements were made to determine the minimum continuous single layer thickness that could be produced for W and Pt. We used X-ray reflectivity to monitor the reflectance from the first order peaks and the number of layers in the multilayered structures. X-ray photoelectron spectroscopy showed that a distinct intermixing layer develops in both W/C and Pt/C. A repeating four-layer model was developed to characterise the X-ray reflectivity patterns with mixed interface layers. The model accounts for all the essential features in the observed reflectivity data with particular attention given to layer thickness and interfacial roughness. Assessment of the films by indentation indicated that they are mechanically reliable with no cracking events or delamination obvious from the load-displacement curves indicating excellent adhesion. An anomalous improvement in hardness and Young's modulus with increasing number of layers was observed. The present results indicate that high-quality ultra-thin W/C and Pt/C tailored multilayer films produced by dc magnetron sputtering show considerable promise as mirrors for high energy X-ray applications. © 2004 Elsevier B.V. All rights reserved.

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