All-silicon polarizing filters for near-infrared wavelengths

American Institute of Physics
Publication Type:
Journal Article
Journal of Applied Physics, 2004, 95 (1), pp. 402 - 404
Issue Date:
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We discuss the design and fabrication of optical filters that are transparent to a preferred linear polarization, but are partially or substantially reflective to the orthogonal linear polarization. The filters are fabricated by depositing thin films of form-birefringent silicon onto silicon wafers using the serial bideposition method. Characteristic curves that are presented for the in-plane principal refractive indices np and ns of the porous films as functions of vapor impingement angle facilitate critical aspects of the filter design. These include matching of a p principal index and an s principal index for films deposited at different angles, and realization of p and s principal indices that satisfy the antireflection condition for the silicon substrate in air.
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