X-ray reflectivity study of radio frequency sputtered silicon oxide on silicon

Publisher:
Elsevier Science Sa
Publication Type:
Journal Article
Citation:
Thin Solid Films, 2005, 489 (1-2), pp. 37 - 41
Issue Date:
2005-01
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An X-ray reflectivity study carried out on 45-450 angstrom films of radio frequency sputtered silicon oxide on silicon, with particular attention given to the interface between film and substrate. In order to model refectivity data it was necessary to in
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