Bideposited thin-film retardation plates for use at deep UV wavelengths

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Journal Article
Current Applied Physics, 2004, 4 (2-4), pp. 106 - 107
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The physical vapour deposition process of serial bideposition is used to fabricate inorganic retardation plates of LaF3, NdF3, Sc2O3and SmF3. For a deposition angle of 70° the form-birefringent materials exhibit linear birefringence in the range 0.09-0.13 at wavelength 248 nm. The study shows that NdF3and Sc2O3are unsuitable for use at 193 nm, due to excessive absorptive loss, and that LaF3is the preferred material. © 2003 Elsevier B.V. All rights reserved.
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