Bideposited thin-film retardation plates for use at deep UV wavelengths

Hodgkinson, I; Hong Wu, Q; Arnold, M; De Silva, L; Blaikie, R

Bideposited thin-film retardation plates for use at deep UV wavelengths

Hodgkinson, I Hong Wu, Q Arnold, M

De Silva, L Blaikie, R

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Publication Type:: Journal Article
Citation:: Current Applied Physics, 2004, 4 (2-4), pp. 106 - 107
Issue Date:: 2004-04-01

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Field	Value	Language
dc.contributor.author	Hodgkinson, I	en_US
dc.contributor.author	Hong Wu, Q	en_US
dc.contributor.author	Arnold, M https://orcid.org/0000-0003-4164-0242	en_US
dc.contributor.author	De Silva, L	en_US
dc.contributor.author	Blaikie, R	en_US
dc.date.issued	2004-04-01	en_US
dc.identifier.citation	Current Applied Physics, 2004, 4 (2-4), pp. 106 - 107	en_US
dc.identifier.issn	1567-1739	en_US
dc.identifier.uri	http://hdl.handle.net/10453/505
dc.description.abstract	The physical vapour deposition process of serial bideposition is used to fabricate inorganic retardation plates of LaF3, NdF3, Sc2O3 and SmF3. For a deposition angle of 70° the form-birefringent materials exhibit linear birefringence in the range 0.09-0.13 at wavelength 248 nm. The study shows that NdF3 and Sc2O3 are unsuitable for use at 193 nm, due to excessive absorptive loss, and that LaF3 is the preferred material. © 2003 Elsevier B.V. All rights reserved.	en_US
dc.relation.ispartof	Current Applied Physics	en_US
dc.relation.isbasedon	10.1016/j.cap.2003.10.007	en_US
dc.subject.classification	Applied Physics	en_US
dc.title	Bideposited thin-film retardation plates for use at deep UV wavelengths	en_US
dc.type	Journal Article
utslib.citation.volume	2-4	en_US
utslib.citation.volume	4	en_US
utslib.for	020504 Photonics, Optoelectronics and Optical Communications	en_US
utslib.for	01 Mathematical Sciences	en_US
utslib.for	02 Physical Sciences	en_US
pubs.embargo.period	Not known	en_US
pubs.organisational-group	/University of Technology Sydney
pubs.organisational-group	/University of Technology Sydney/Faculty of Science
pubs.organisational-group	/University of Technology Sydney/Faculty of Science/School of Mathematical and Physical Sciences
utslib.copyright.status	closed_access
pubs.issue	2-4	en_US
pubs.publication-status	Published	en_US
pubs.volume	4	en_US

Abstract:

The physical vapour deposition process of serial bideposition is used to fabricate inorganic retardation plates of LaF3, NdF3, Sc2O3 and SmF3. For a deposition angle of 70° the form-birefringent materials exhibit linear birefringence in the range 0.09-0.13 at wavelength 248 nm. The study shows that NdF3 and Sc2O3 are unsuitable for use at 193 nm, due to excessive absorptive loss, and that LaF3 is the preferred material. © 2003 Elsevier B.V. All rights reserved.

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http://hdl.handle.net/10453/505