Metal-insulator-metal (MIM) nanocapacitors and effects of material properties on their operation

Ekanayake, SR; Ford, M; Cortie, M

Metal-insulator-metal (MIM) nanocapacitors and effects of material properties on their operation

Ekanayake, SR Ford, M

Cortie, M

Permalink

Publication Type:: Journal Article
Citation:: Materials Forum, 2004, 27 pp. 15 - 20
Issue Date:: 2004-12-01

Open Access

Copyright Clearance Process

Recently Added
In Progress
Open Access

This item is open access.

Adobe PDF

Download full textAdobe PDF (182.4 kB)

View statistics

Full metadata record

Field	Value	Language
dc.contributor.author	Ekanayake, SR	en_US
dc.contributor.author	Ford, M https://orcid.org/0000-0002-8595-5900	en_US
dc.contributor.author	Cortie, M https://orcid.org/0000-0003-3202-6398	en_US
dc.date.issued	2004-12-01	en_US
dc.identifier.citation	Materials Forum, 2004, 27 pp. 15 - 20	en_US
dc.identifier.issn	0883-2900	en_US
dc.identifier.uri	http://hdl.handle.net/10453/5687
dc.description.abstract	Metal-insulator-metal (MIM) capacitors play an important part in many integrated electronic circuits in the areas of analog, microwave, and radio frequency systems. However the transverse dimensions of current MIM capacitors are in the micrometer scale. If integrated circuits continue to be miniaturized, the capacitor, alongside other components, must also be miniaturized to realize nanoelectronic circuits and systems. This article presents a novel device, the nanocapacitor, of which the dimensions are constrained to nanoscale in longitudinal and transverse directions, and discusses the effects of material properties on their operation. In particular, this work discusses the effects of dielectric constant, dielectric strength, and quantum electrical phenomena on achieving relatively high capacitances and capacitance densities in nanocapacitors. © Institute of Materials Engineering Australasia Ltd - Materials Forum Volume 27 - Published 2004.	en_US
dc.relation.ispartof	Materials Forum	en_US
dc.title	Metal-insulator-metal (MIM) nanocapacitors and effects of material properties on their operation	en_US
dc.type	Journal Article
utslib.citation.volume	27	en_US
utslib.for	0306 Physical Chemistry (incl. Structural)	en_US
utslib.for	0204 Condensed Matter Physics	en_US
dc.location.activity	Porto, PORTUGAL
pubs.embargo.period	Not known	en_US
pubs.organisational-group	/University of Technology Sydney
pubs.organisational-group	/University of Technology Sydney/DVC (Research)
pubs.organisational-group	/University of Technology Sydney/Faculty of Engineering and Information Technology
pubs.organisational-group	/University of Technology Sydney/Faculty of Science
pubs.organisational-group	/University of Technology Sydney/Faculty of Science/School of Mathematical and Physical Sciences
utslib.copyright.status	open_access
pubs.publication-status	Published	en_US
pubs.volume	27	en_US

Abstract:

Metal-insulator-metal (MIM) capacitors play an important part in many integrated electronic circuits in the areas of analog, microwave, and radio frequency systems. However the transverse dimensions of current MIM capacitors are in the micrometer scale. If integrated circuits continue to be miniaturized, the capacitor, alongside other components, must also be miniaturized to realize nanoelectronic circuits and systems. This article presents a novel device, the nanocapacitor, of which the dimensions are constrained to nanoscale in longitudinal and transverse directions, and discusses the effects of material properties on their operation. In particular, this work discusses the effects of dielectric constant, dielectric strength, and quantum electrical phenomena on achieving relatively high capacitances and capacitance densities in nanocapacitors. © Institute of Materials Engineering Australasia Ltd - Materials Forum Volume 27 - Published 2004.

Please use this identifier to cite or link to this item:

http://hdl.handle.net/10453/5687