High temperature behaviour of magnetron sputtered nanocrystalline titanium aluminium nitride coatings

Institute of Materials Engineering, Australasia
Publication Type:
Journal Article
Materials Forum, 2006, 30 pp. 77 - 84
Issue Date:
Full metadata record
This paper is to study the thermal stability of nanocrystalline ternary nitride coatings at elevated temperatures. Nanocrystalline titanium aluminium nitride coatings were produced by reactive magnetron co-sputtering on glass substrates and AISI H13 tool steel substrates with nitrogen pressures of 0.4 and 0.65 mTorr (0.053 and 0.086 Pa) respectively. Heat treatment was applied to the coatings at temperatures up to 1000C. It was found that an unexpected grain refinement occurred in the coatings deposited at 0.4 mTorr nitrogen pressure after the heat treatment. a stronger development of TiN(TiAIN (200) component was also evident at temperatures above 800C. With a finer and densified grain struicture, the hardness of the coatings increased substantially from ~1700 to 2300HV.
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