High temperature behaviour of magnetron sputtered nanocrystalline titanium aluminium nitride coatings

Yeung, WY; Wuhrer, R; Attard, D

High temperature behaviour of magnetron sputtered nanocrystalline titanium aluminium nitride coatings

Yeung, WY Wuhrer, R Attard, D

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Publisher:: Institute of Materials Engineering, Australasia
Publication Type:: Journal Article
Citation:: Materials Forum, 2006, 30 pp. 77 - 84
Issue Date:: 2006-01

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Field	Value	Language
dc.contributor.author	Yeung, WY	en_US
dc.contributor.author	Wuhrer, R	en_US
dc.contributor.author	Attard, D	en_US
dc.date.issued	2006-01	en_US
dc.identifier.citation	Materials Forum, 2006, 30 pp. 77 - 84	en_US
dc.identifier.issn	1447-6738	en_US
dc.identifier.uri	http://hdl.handle.net/10453/5700
dc.description.abstract	This paper is to study the thermal stability of nanocrystalline ternary nitride coatings at elevated temperatures. Nanocrystalline titanium aluminium nitride coatings were produced by reactive magnetron co-sputtering on glass substrates and AISI H13 tool steel substrates with nitrogen pressures of 0.4 and 0.65 mTorr (0.053 and 0.086 Pa) respectively. Heat treatment was applied to the coatings at temperatures up to 1000C. It was found that an unexpected grain refinement occurred in the coatings deposited at 0.4 mTorr nitrogen pressure after the heat treatment. a stronger development of TiN(TiAIN (200) component was also evident at temperatures above 800C. With a finer and densified grain struicture, the hardness of the coatings increased substantially from ~1700 to 2300HV.	en_US
dc.publisher	Institute of Materials Engineering, Australasia	en_US
dc.relation.ispartof	Materials Forum	en_US
dc.title	High temperature behaviour of magnetron sputtered nanocrystalline titanium aluminium nitride coatings	en_US
dc.type	Journal Article
utslib.citation.volume	30	en_US
utslib.for	091207 Metals and Alloy Materials	en_US
utslib.for	091202 Composite and Hybrid Materials	en_US
dc.location.activity	Bangkok, Thailand
pubs.embargo.period	Not known	en_US
pubs.organisational-group	/University of Technology Sydney
pubs.organisational-group	/University of Technology Sydney/Faculty of Science
utslib.copyright.status	open_access
pubs.consider-herdc	true	en_US
pubs.volume	30	en_US

Abstract:

This paper is to study the thermal stability of nanocrystalline ternary nitride coatings at elevated temperatures. Nanocrystalline titanium aluminium nitride coatings were produced by reactive magnetron co-sputtering on glass substrates and AISI H13 tool steel substrates with nitrogen pressures of 0.4 and 0.65 mTorr (0.053 and 0.086 Pa) respectively. Heat treatment was applied to the coatings at temperatures up to 1000C. It was found that an unexpected grain refinement occurred in the coatings deposited at 0.4 mTorr nitrogen pressure after the heat treatment. a stronger development of TiN(TiAIN (200) component was also evident at temperatures above 800C. With a finer and densified grain struicture, the hardness of the coatings increased substantially from ~1700 to 2300HV.

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http://hdl.handle.net/10453/5700