X-ray mapping using a multiple-EDS (DUAL) detector

Cambridge University Press
Publication Type:
Conference Proceeding
Proceedings of Microscopy & Microanalysis 12, suppl. 2, 2006, 2006, pp. 1406 - 1407
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X-ray mapping (XRM) is an extremely useful problem solving tool. However, the two major problems for energy dispersive spectroscopy are interpretation of results under non ideal conditions (strong overlap and small peak size relative to background), and the time required to obtain a good quality 256x256 pixel map (1 to 3 hours). XRM has been considered a slow technique, claiming many hours of SEM time and often relegated to out-of-hours (overnight) mapping. With the development of high count rate silicon high resolution drift detectors (SDD) [1, 2] and multi-detector systems [3], the time required to acquire XRM decreases. With a single EDS detector at 20kcps output, a good 512x512 quantitative map can be obtained in around 4 to 8 hours for major elements (>10wt% evenly distributed) and minor elements (>1wt% localised).
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