A method to measure the effective gas path length in the environmental or variable pressure scanning electron microscope

Gauvin, R; Griffin, B; Nockolds, C; Phillips, M; Joy, DC

A method to measure the effective gas path length in the environmental or variable pressure scanning electron microscope

Gauvin, R Griffin, B Nockolds, C Phillips, M

Joy, DC

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Publication Type:: Journal Article
Citation:: Scanning, 2002, 24 (4), pp. 171 - 174
Issue Date:: 2002-01-01

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Field	Value	Language
dc.contributor.author	Gauvin, R	en_US
dc.contributor.author	Griffin, B	en_US
dc.contributor.author	Nockolds, C	en_US
dc.contributor.author	Phillips, M https://orcid.org/0000-0003-1522-9281	en_US
dc.contributor.author	Joy, DC	en_US
dc.date.issued	2002-01-01	en_US
dc.identifier.citation	Scanning, 2002, 24 (4), pp. 171 - 174	en_US
dc.identifier.issn	0161-0457	en_US
dc.identifier.uri	http://hdl.handle.net/10453/8344
dc.description.abstract	A simple method is described to determine the effective gas path length when incident electrons scatter in the gas above the specimen. This method is based on the measurement of a characteristic x-ray line emitted from a region close to the incident beam. From various experimental measurements performed on various microscopes, it is shown that the effective gas path length may increase with the chamber pressure and that it is also often dependent of the type of x-ray bullet.	en_US
dc.relation.ispartof	Scanning	en_US
dc.subject.classification	Microscopy	en_US
dc.title	A method to measure the effective gas path length in the environmental or variable pressure scanning electron microscope	en_US
dc.type	Journal Article
utslib.citation.volume	4	en_US
utslib.citation.volume	24	en_US
utslib.for	0912 Materials Engineering	en_US
utslib.for	0204 Condensed Matter Physics	en_US
utslib.for	0299 Other Physical Sciences	en_US
utslib.for	0601 Biochemistry and Cell Biology	en_US
pubs.embargo.period	Not known	en_US
pubs.organisational-group	/University of Technology Sydney
pubs.organisational-group	/University of Technology Sydney/Faculty of Science
pubs.organisational-group	/University of Technology Sydney/Faculty of Science/School of Mathematical and Physical Sciences
pubs.organisational-group	/University of Technology Sydney/Strength - CCET - Centre for Clean Energy Technology
utslib.copyright.status	closed_access
pubs.issue	4	en_US
pubs.publication-status	Published	en_US
pubs.volume	24	en_US

Abstract:

A simple method is described to determine the effective gas path length when incident electrons scatter in the gas above the specimen. This method is based on the measurement of a characteristic x-ray line emitted from a region close to the incident beam. From various experimental measurements performed on various microscopes, it is shown that the effective gas path length may increase with the chamber pressure and that it is also often dependent of the type of x-ray bullet.

Please use this identifier to cite or link to this item:

http://hdl.handle.net/10453/8344