High bandwidth secondary electron detection in variable pressure scanning electron microscopy using a Frisch grid

IOP Publishing Ltd
Publication Type:
Journal Article
Journal Of Physics D-Applied Physics, 2008, 41 (5), pp. 1 - 6
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The bandwidth and contrast of secondary electron ( SE) images obtained using variable pressure scanning electron microscopy are enhanced when a grounded Frisch grid is placed between the SE detecting anode and the negatively biased stage. The improvement
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