High bandwidth secondary electron detection in variable pressure scanning electron microscopy using a Frisch grid

Morgan, SW; Phillips, MR

High bandwidth secondary electron detection in variable pressure scanning electron microscopy using a Frisch grid

Morgan, SW Phillips, MR

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Publication Type:: Journal Article
Citation:: Journal of Physics D: Applied Physics, 2008, 41 (5)
Issue Date:: 2008-03-07

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Field	Value	Language
dc.contributor.author	Morgan, SW	en_US
dc.contributor.author	Phillips, MR https://orcid.org/0000-0003-1522-9281	en_US
dc.date.issued	2008-03-07	en_US
dc.identifier.citation	Journal of Physics D: Applied Physics, 2008, 41 (5)	en_US
dc.identifier.issn	0022-3727	en_US
dc.identifier.uri	http://hdl.handle.net/10453/8392
dc.description.abstract	The bandwidth and contrast of secondary electron (SE) images obtained using variable pressure scanning electron microscopy are enhanced when a grounded Frisch grid is placed between the SE detecting anode and the negatively biased stage. The improvement in SE image quality occurs as a consequence of the grounded Frisch grid electrostatically screening the 'slow' induced ion current signal, generated below the grid, from the induced current detected above the grid by the anode. Ion induced artefacts, such as image smearing at fast scan rates, are virtually eliminated using a Frisch grid. Gas amplification data are presented to illustrate that gas gain can be optimized by varying the Frisch grid-stage (amplification region) separation Frisch grid-anode (drift region) separation and stage bias. © 2008 IOP Publishing Ltd.	en_US
dc.relation.ispartof	Journal of Physics D: Applied Physics	en_US
dc.relation.isbasedon	10.1088/0022-3727/41/5/055504	en_US
dc.subject.classification	Applied Physics	en_US
dc.title	High bandwidth secondary electron detection in variable pressure scanning electron microscopy using a Frisch grid	en_US
dc.type	Journal Article
utslib.citation.volume	5	en_US
utslib.citation.volume	41	en_US
utslib.for	0204 Condensed Matter Physics	en_US
utslib.for	02 Physical Sciences	en_US
utslib.for	09 Engineering	en_US
dc.location.activity	ISI:000254153800050	en_US
pubs.embargo.period	Not known	en_US
pubs.organisational-group	/University of Technology Sydney
pubs.organisational-group	/University of Technology Sydney/Faculty of Science
pubs.organisational-group	/University of Technology Sydney/Faculty of Science/School of Mathematical and Physical Sciences
pubs.organisational-group	/University of Technology Sydney/Strength - CCET - Centre for Clean Energy Technology
utslib.copyright.status	closed_access
pubs.issue	5	en_US
pubs.publication-status	Published	en_US
pubs.volume	41	en_US

Abstract:

The bandwidth and contrast of secondary electron (SE) images obtained using variable pressure scanning electron microscopy are enhanced when a grounded Frisch grid is placed between the SE detecting anode and the negatively biased stage. The improvement in SE image quality occurs as a consequence of the grounded Frisch grid electrostatically screening the 'slow' induced ion current signal, generated below the grid, from the induced current detected above the grid by the anode. Ion induced artefacts, such as image smearing at fast scan rates, are virtually eliminated using a Frisch grid. Gas amplification data are presented to illustrate that gas gain can be optimized by varying the Frisch grid-stage (amplification region) separation Frisch grid-anode (drift region) separation and stage bias. © 2008 IOP Publishing Ltd.

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http://hdl.handle.net/10453/8392