Thin films of ZnO and ZnMnO by atomic layer epitaxy

Publisher:
Institute of Physics, Wroclaw University of Technology and SPIE - The International Society for Opti
Publication Type:
Journal Article
Citation:
Optica Applicata, 2005, 35 (3), pp. 413 - 417
Issue Date:
2005-01
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We discuss properties of thin films of ZnO and ZnMnO grown with atomic layer epitaxy using new, organic zinc and manganese precursors. Several characterization techniques, including X-ray diffraction, atomic force microscopy, scanning electron microscopy, cathodoluminescence, superconducting quantum interfernece device (SQUID) and electron spin resonance, show good topography of the films and their advantageous optical and magnetic properties.
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