Nanostructured TiN Thin films suitable for medical applications

The Institute of Materials engineering Australasia Ltd
Publication Type:
Journal Article
Materials forum, 2008, 32 pp. 129 - 136
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Titanium nitride thin films are widely used in biomedical implants because of thier biocompatibility, good mechanical properties and high corrosion resistance. Titanium nitride (TiN) thin films on silicon and glass substrates were prepared using a dc megnetron sputtering system under condition of systematically varying the nitrogen pressure and titanium megnetron power.
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