Single crystal diamond membranes for nanoelectronics

Bray, K; Kato, H; Previdi, R; Sandstrom, R; Ganesan, K; Ogura, M; Makino, T; Yamasaki, S; Magyar, AP; Toth, M; Aharonovich, I

Single crystal diamond membranes for nanoelectronics

Bray, K Kato, H Previdi, R Sandstrom, R Ganesan, K Ogura, M Makino, T Yamasaki, S Magyar, AP Toth, M

Aharonovich, I

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Publication Type:: Journal Article
Citation:: Nanoscale, 2018, 10 (8), pp. 4028 - 4035
Issue Date:: 2018-02-28

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Field	Value	Language
dc.contributor.author	Bray, K	en_US
dc.contributor.author	Kato, H	en_US
dc.contributor.author	Previdi, R	en_US
dc.contributor.author	Sandstrom, R	en_US
dc.contributor.author	Ganesan, K	en_US
dc.contributor.author	Ogura, M	en_US
dc.contributor.author	Makino, T	en_US
dc.contributor.author	Yamasaki, S	en_US
dc.contributor.author	Magyar, AP	en_US
dc.contributor.author	Toth, M https://orcid.org/0000-0003-1564-4899	en_US
dc.contributor.author	Aharonovich, I https://orcid.org/0000-0003-4304-3935	en_US
dc.date.issued	2018-02-28	en_US
dc.identifier.citation	Nanoscale, 2018, 10 (8), pp. 4028 - 4035	en_US
dc.identifier.issn	2040-3364	en_US
dc.identifier.uri	http://hdl.handle.net/10453/131002
dc.description.abstract	© 2018 The Royal Society of Chemistry. Single crystal, nanoscale diamond membranes are highly sought after for a variety of applications including nanophotonics, nanoelectronics and quantum information science. However, so far, the availability of conductive diamond membranes has remained an unreachable goal. In this work we present a complete nanofabrication methodology for engineering high aspect ratio, electrically active single crystal diamond membranes. The membranes have large lateral directions, exceeding ∼500 × 500 μm2 and are only several hundreds of nanometers thick. We further realize vertical single crystal p-n junctions made from the diamond membranes that exhibit onset voltages of ∼10 V and a current of several mA. Moreover, we deterministically introduce optically active color centers into the membranes, and demonstrate for the first time a single crystal nanoscale diamond LED. The robust and scalable approach to engineer the electrically active single crystal diamond membranes offers new pathways for advanced nanophotonic, nanoelectronic and optomechanical devices employing diamond.	en_US
dc.relation	http://purl.org/au-research/grants/arc/DP140102721
dc.relation	http://purl.org/au-research/grants/arc/DE130100592
dc.relation.ispartof	Nanoscale	en_US
dc.relation.isbasedon	10.1039/c7nr09097h	en_US
dc.subject.classification	Nanoscience & Nanotechnology	en_US
dc.title	Single crystal diamond membranes for nanoelectronics	en_US
dc.type	Journal Article
utslib.citation.volume	8	en_US
utslib.citation.volume	10	en_US
utslib.for	10 Technology	en_US
utslib.for	02 Physical Sciences	en_US
utslib.for	03 Chemical Sciences	en_US
pubs.embargo.period	Not known	en_US
pubs.organisational-group	/University of Technology Sydney
pubs.organisational-group	/University of Technology Sydney/Faculty of Science
pubs.organisational-group	/University of Technology Sydney/Faculty of Science/School of Mathematical and Physical Sciences
pubs.organisational-group	/University of Technology Sydney/Strength - IBMD - Initiative for Biomedical Devices
pubs.organisational-group	/University of Technology Sydney/Strength - MTEE - Research Centre Materials and Technology for Energy Efficiency
utslib.copyright.status	open_access
pubs.issue	8	en_US
pubs.publication-status	Published	en_US
pubs.volume	10	en_US

Abstract:

© 2018 The Royal Society of Chemistry. Single crystal, nanoscale diamond membranes are highly sought after for a variety of applications including nanophotonics, nanoelectronics and quantum information science. However, so far, the availability of conductive diamond membranes has remained an unreachable goal. In this work we present a complete nanofabrication methodology for engineering high aspect ratio, electrically active single crystal diamond membranes. The membranes have large lateral directions, exceeding ∼500 × 500 μm2 and are only several hundreds of nanometers thick. We further realize vertical single crystal p-n junctions made from the diamond membranes that exhibit onset voltages of ∼10 V and a current of several mA. Moreover, we deterministically introduce optically active color centers into the membranes, and demonstrate for the first time a single crystal nanoscale diamond LED. The robust and scalable approach to engineer the electrically active single crystal diamond membranes offers new pathways for advanced nanophotonic, nanoelectronic and optomechanical devices employing diamond.

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http://hdl.handle.net/10453/131002