Nanocapacitive circuit elements

Publication Type:
Journal Article
Citation:
ACS Nano, 2008, 2 (8), pp. 1615 - 1619
Issue Date:
2008-08-01
Metrics:
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"Natural" lithography was used to prepare arrays of nanoscale capacitors on silicon. The capacitance was verified by a novel technique based on the interaction of a charged substrate with the electron beam of a scanning electron microscope. The "nanocapacitors" possessed a capacitance of ∼1 × 10-16F and were observed to hold charge for over an hour. Our results indicate that fabricating nanostructures using natural lithography may provide a viable alternative for future nanoelectronic devices. © 2008 American Chemical Society.
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