Issue Date | Title | Author(s) |
2024-01-26 | A Study on PVD PZT and Sc0.2Al0.8N PMUTS in Series and Parallel Connection for Optimizing Acoustic Performance | Choong, DSW; Chen, DS-H; Sarafianou, M; Goh, DJ; Liu, J; Merugu, S; Ghosh, S; Ramegowda, P; Zhang, QX; Chang, P; Lee, JE-Y; Jia, J; Leotti, A; Baretta, L; Giusti, D; Savoia, A; Koh, Y |
2023-09-22 | Cavity-Agnostic Acoustofluidic Functions Enabled by Guided Flexural Waves on a Membrane Acoustic Waveguide Actuator | Vachon, P; Merugu, S; Sharma, J; Lal, A; Ng, E; Koh, Y; Lee, J; Lee, C |
- | Cavity-agnostic acoustofluidic manipulations enabled by guided flexural waves on a membrane acoustic waveguide actuator | Vachon, P; Merugu, S; Sharma, J; Lal, A; Ng, EJ; Koh, Y; Lee, JE-Y; Lee, C |
2024 | Close Range and High Resolution Detection of Vibration By Ultrasonic Wave Using Silicon-On-Nothing PMUTs | Koh, Y; Chen, DS-H; Sarafianou, M; Sharma, J; Goh, DJ; Choong, DSW; Ng, EJ; Lee, JE-Y |
2023-11-07 | Extraction of Material Properties of A Thin Silicon Membrane Embedded in A Piezoelectric Stack | Ghosh, S; Ramegowda, PC; Jian Goh, D; Sharma, J; Koh, Y; Lee, JE-Y |
2023-01-18 | In-line test structures for yield improvement in MEMS/NEMS device | Sharma, J; Koh, Y; Ghosh, S; Wong, HX; Lee, JE-Y |
2023-11-01 | Iterative Analysis Approach using interactive Python-FEM to estimate the residual stresses in PMUTs | Ramegowda, PC; Choong, DSW; Goh, DJ; Jihang, L; Merugu, S; Chang, P; Leotti, A; Giusti, D; Prelini, C; Ghosh, S; Lee, JE-Y; Koh, Y |
2024-01-25 | Long-Range Ultrasound Wake-Up Receiver Using Pzt-Scaln Hybrid Pmut Link With Exponential Horn | Trivedi, S; Goh, DJ; Chen, W; Toh, WD; Zhang, J; Ghosh, S; Giusti, D; Leotti, A; Chan, HC; Koppisetti, G; Zhang, Y; Gao, Y; Lee, JE-Y; Koh, Y |
2023-03-28 | Microfabricated acoustofluidic membrane acoustic waveguide actuator for highly localized in-droplet dynamic particle manipulation. | Vachon, P; Merugu, S; Sharma, J; Lal, A; Ng, EJ; Koh, Y; Lee, JE-Y; Lee, C |
2022-12-08 | Nano-Gap Contact MEMS Torsional Mode Acceleration Switch Wake-up Sensor | Koh, Y; Goh, DJ; Ghosh, S; Wong, HX; Sharma, J; Lal, A; Ng, EJ; Lee, JE-Y |
2023-01-01 | Near Zero-Power Environment Temperature Micromechanical Sensor-Switch Enabled by Sub-Micron Gap | Goh, DJ; Koh, Y; Ghosh, S; Sharma, J; Teo, YS; Lal, A; Lee, JEY |
2023-11-07 | Performance Analysis of Wideband PMUTs: a Comparative Study Between Sol-Gel PZT, PVD PZT, and 15% ScAlN-Based Arrays Through Experimental Evaluation | Savoia, AS; Giusti, D; Prelini, C; Chang, P; Leotti, A; Lee, J; Koh, Y; Ferrera, M |
2022-12-08 | Silicon Electrothermal Microactuators as Zero Standby Power Local Temperature Switches | Wong, HX; Koh, Y; Goh, DJ; Sharma, J; Merugu, S; Lee, JE-Y |
2024-01-26 | Temperature Coefficients of Transverse Elastic Properties of Scandium-Doped Aluminum Nitride (ScAlN) Thin Film Grown on Preformed Cavities | Ghosh, S; Ramegowda, PC; Goh, DJ; Sharma, J; Koh, Y; Lee, J |
2024-01-26 | Towards Unparallelled CMOS-compatible Air-coupled pMUT Performance with 30% Sc-doped AlN through an Analysis of Residual Stress Effects | Liu, J; Jian, GD; Chen, DS-H; Wai, DCS; Shyam, T; Ramegowda, PC; Srinivas, M; Huamao, L; Xin, ZQ; Kee, PCH; Das, A; Sciarrone, A; Leotti, A; Giusti, D; Lee, JE-Y; Koh, Y |
2022-12-01 | Trapping of Microbead Spheroids by pMUTs in Microfluidic Channels Embedded with an Acoustic Reflector | Koh, Y; Goh, DJ; Choong, DSW; Chen, W; Chen, DS-H; Ng, EJ; Lee, JE-Y |
2023-11-01 | Ultra-Low Power MEMS Inertial Switch Based Wake-Up Wireless Sensing Node for Door Lock Monitoring | Ghosh, S; Goh, DJ; Hu, Z; Sharma, J; Teo, YS; McCarthy, M; Ramegowda, PC; Da Toh, W; Chen, W; Murugan, A; Zhang, Y; Tsuchiya, Y; Lal, A; Lee, JE-Y; Koh, Y |