Issue Date | Title | Author(s) |
2023-09-22 | Cavity-Agnostic Acoustofluidic Functions Enabled by Guided Flexural Waves on a Membrane Acoustic Waveguide Actuator | Vachon, P; Merugu, S; Sharma, J; Lal, A; Ng, E; Koh, Y; Lee, J; Lee, C |
- | Cavity-agnostic acoustofluidic manipulations enabled by guided flexural waves on a membrane acoustic waveguide actuator | Vachon, P; Merugu, S; Sharma, J; Lal, A; Ng, EJ; Koh, Y; Lee, JE-Y; Lee, C |
2024 | Close Range and High Resolution Detection of Vibration By Ultrasonic Wave Using Silicon-On-Nothing PMUTs | Koh, Y; Chen, DS-H; Sarafianou, M; Sharma, J; Goh, DJ; Choong, DSW; Ng, EJ; Lee, JE-Y |
2023-11-07 | Extraction of Material Properties of A Thin Silicon Membrane Embedded in A Piezoelectric Stack | Ghosh, S; Ramegowda, PC; Jian Goh, D; Sharma, J; Koh, Y; Lee, JE-Y |
2023-01-18 | In-line test structures for yield improvement in MEMS/NEMS device | Sharma, J; Koh, Y; Ghosh, S; Wong, HX; Lee, JE-Y |
2023-10-15 | Long-Range High-Resolution Imaging With Silicon-on-Nothing ScAlN pMUTs | Sarafianou, M; Choong, DSW; Chen, DSH; Goh, DJ; Yao, Z; Sharma, J; Merugu, S; Ng, EJ; Lee, JEY |
2023-03-28 | Microfabricated acoustofluidic membrane acoustic waveguide actuator for highly localized in-droplet dynamic particle manipulation. | Vachon, P; Merugu, S; Sharma, J; Lal, A; Ng, EJ; Koh, Y; Lee, JE-Y; Lee, C |
2022-12-08 | Nano-Gap Contact MEMS Torsional Mode Acceleration Switch Wake-up Sensor | Koh, Y; Goh, DJ; Ghosh, S; Wong, HX; Sharma, J; Lal, A; Ng, EJ; Lee, JE-Y |
2023-01-01 | Near Zero-Power Environment Temperature Micromechanical Sensor-Switch Enabled by Sub-Micron Gap | Goh, DJ; Koh, Y; Ghosh, S; Sharma, J; Teo, YS; Lal, A; Lee, JEY |
2022-12-01 | Parameter Extraction of Thin-Film Scandium-Doped Aluminum Nitride in Piezoelectric Over Silicon-On-Nothing Platform | Ghosh, S; Ramegowda, P; Ng, E; Ali, Z; Goh, DJ; Sharma, J; Wong, HX; Lee, J |
2022-12-08 | Silicon Electrothermal Microactuators as Zero Standby Power Local Temperature Switches | Wong, HX; Koh, Y; Goh, DJ; Sharma, J; Merugu, S; Lee, JE-Y |
2024-01-26 | Temperature Coefficients of Transverse Elastic Properties of Scandium-Doped Aluminum Nitride (ScAlN) Thin Film Grown on Preformed Cavities | Ghosh, S; Ramegowda, PC; Goh, DJ; Sharma, J; Koh, Y; Lee, J |
2023-11-01 | Ultra-Low Power MEMS Inertial Switch Based Wake-Up Wireless Sensing Node for Door Lock Monitoring | Ghosh, S; Goh, DJ; Hu, Z; Sharma, J; Teo, YS; McCarthy, M; Ramegowda, PC; Da Toh, W; Chen, W; Murugan, A; Zhang, Y; Tsuchiya, Y; Lal, A; Lee, JE-Y; Koh, Y |